230 nm远紫外LED封装器件制备与应用研究  

Research on the Fabrication and Application of 230 nm Far-UVC LED Packaging Device

作　　者：李文博 李文涛[2] 汤乐明 杨勇 许奇明 沈雁伟 LI Wenbo;LI Wentao;TANG Leming;YANG Yong;XU Qiming;SHEN Yanwei(Guangdong Institute of Semiconductor Micro‑Nano Manufacturing Technology,Foshan Guangdong 528225,CHN;State Key Laboratory of Pollution Control and Resources Reuse,School of theEnvironment,Nanjing University,Nanjing 210023,CHN;Gusu Laboratory of Materials,Suzhou Jiangsu 215123,CHN;Suzhou LEKIN Semiconductor Co.,Ltd.,Suzhou Jiangsu 215413,CHN)

机构地区：[1]广东中科半导体微纳制造技术研究院,广东佛山528000 [2]南京大学环境学院污染控制与资源化研究国家重点实验室,南京210023 [3]材料科学姑苏实验室,江苏苏州215123 [4]苏州立琻半导体有限公司,江苏苏州215413

出　　处：《光电子技术》2023年第3期233-237,共5页Optoelectronic Technology

基　　金：广东省重点领域研发计划资助(2020B0101130001)。

摘　　要：制备了230 nm远紫外LED封装器件,并研究了氟树脂材料应用于封装器件对光电性能与可靠性的影响,结果表明氟树脂材料封装可使230 nm远紫外LED封装器件光功率提升13%,可达1 mW以上,并未对器件老化性能造成影响。但测试也发现当前230 nm远紫外LED封装器件性能还有所不足,光电转换效率小于0.1%,常温老化216 h光维持率为45%。以230 nm远紫外LED封装器件作为光源进行吸光度检测,测试结果显示当光程为1 cm时硝酸盐氮浓度在0~15 mg/L范围与吸光度成线性相关,可用于水质中硝酸盐氮浓度的检测。The 230 nm far-UVC LED packaging device was fabricated,and the influence of the photoelectric performance and reliability by using fluorine resin for packaging were studied.The results showed that the optical power of 230 nm far-UVC LED packaging device with fluorine resin had a increase of 13%,which could reach 1 mW,and no influence was found in aging performance,while the photoelectric conversion efficiency was still less than 0.1%.After 216 h normal temperature aging,the light maintenance rate decreased to 45%.The application of 230 nm far-UVC device for detection of nitrate concentration was also evaluated.The results showed that when the concentration was lower than 15 mg/L,the absorbance in cm-1 showed a linear relationship with the concentration of the nitrate solution,which indicated that the 230 nm far-UVC device could be used in nitrate determination.

关 键 词：远紫外 氟树脂材料 光电转换效率 硝酸盐氮检测 

分 类 号：TN23[电子电信—物理电子学]