轻量化真空紫外光谱辐射计技术研究  

Research on High Precision Vacuum Ultraviolet Spectroradiometer Technology

作　　者：刘豪 赵天琦 占春连 邹艳霞 金尚忠 LIU Hao;ZHAO Tianqi;ZHAN Chunlian;ZOU Yanxia;JIN Shangzhong(College of Optical and Electronic Technology,China Jiliang University,Hangzhou 310018,CHN)

机构地区：[1]中国计量大学光学与电子科技学院,杭州310018

出　　处：《光电子技术》2023年第3期269-275,共7页Optoelectronic Technology

摘　　要：对真空紫外光谱辐射计的探测系统、光学系统、真空舱开展了研究和设计,研制了一台轻量化、小型化的高灵敏真空紫外光谱辐射计,并对真空紫外辐射计的光谱范围、中心波长、光谱辐射亮度等性能进行了测试。测试结果表明辐射计光谱范围覆盖了115 nm~200 nm的真空紫外波段,实现了最大响应度分别在121.2 nm、135.6 nm、160 nm、180 nm、200 nm五个工作波长附近,且中心波长的相对示值误差均小于3%,利用定标氘灯测量辐射计在全波段的真空紫外光谱辐射亮度在0.0064~3.9239μW/cm^(2)·nm·Sr之间,实现了对真空紫外光谱辐射亮度0.01量级以下的测量。Through the research and design of the detection system,optical system and vacuum chamber of the vacuum ultraviolet spectral radiometer,a lightweight,miniaturized and highly sensitive vacuum ultraviolet spectral radiometer was developed.The spectral range,central wavelength and spectral radiance of the vacuum ultraviolet radiometer were tested.The test results showed that the spectral range of the radiometer covered the vacuum ultraviolet band of 115 nm~200 nm,and the maximum responsivity was around five working wavelengths of 121.2 nm,135.6 nm,160 nm,180 nm and 200 nm,respectively.The vacuum ultraviolet spectral radiance of the radiometer in the full band was measured by using a calibrated deuterium lamp at 0.0064~3.9239μW/cm^(2)·nm·sr,and the measurement accuracy could reach 0.01μW/cm^(2)·nm·Sr.

关 键 词：真空紫外 高精度 光电倍增管 辐射计 微通道板 

分 类 号：TN23[电子电信—物理电子学]