基于计算全息的高质量贝塞尔光束阵列产生方法  

High Quality Bessel Beam Array Generation Method Based on Computer Generated Holography

作　　者：张睿迪 段亚轩[1,3] 达争尚 ZHANG Ruidi;DUAN Yaxuan;DA Zhengshang(Advanced Optical Instrument Research Department,Xi'an Institute of Optics and Precision Mechanics,Chinese Academy of Sciences,Xi'an 710119,China;University of Chinese Academy of Sciences,Beijing 100049,China;Xi'an Key Laboratory of High Power Laser Measurement Technology and Instruments,Xi'an 710119,China)

机构地区：[1]中国科学院西安光学精密机械研究所先进光学仪器研究室,西安710119 [2]中国科学院大学,北京100049 [3]西安市高功率激光测量技术与仪器重点实验室,西安710119

出　　处：《光子学报》2023年第9期261-272,共12页Acta Photonica Sinica

基　　金：国家重点研发计划(No.2021YFC2203501);国家自然科学基金(No.61705254);陕西省重点研发计划(No.2020GY‒114)。

摘　　要：针对传统计算全息法生成的贝塞尔光束阵列均匀性差,能量利用率低的问题,提出了两种计算全息法,分别可以生成高质量的平行、发散贝塞尔光束阵列。提出多轴锥透镜相位并行拼接法,通过提高窗口的“口径利用率”,有效降低了光场的背景噪声,提高了能量利用率,仿真结果表明,所产生的3×3平行贝塞尔光束阵列均匀性为98.94%,衍射效率为78.12%;提出多透镜和轴锥透镜相位叠加法,通过多个透镜和轴锥透镜相位叠加来调控贝塞尔光束的数量和位置,透镜相位对贝塞尔光束起到聚焦的作用,可以在透镜后焦面附近得到中心光斑直径缩小的贝塞尔光束阵列,仿真结果表明,所产生的3×3发散贝塞尔光束阵列均匀性为97.95%,衍射效率为79.23%。实验采集了贝塞尔光束阵列沿传输方向120 mm,130 mm,140 mm位置处的图像,与仿真结果高度一致。相比于传统方法,本文所提方法产生的平行、发散贝塞尔光束阵列均匀性分别提高了2.97%和4.70%,衍射效率分别提高了48.22%和54.75%。Bessel beam array has been widely used in femtosecond laser processing,particle capture,optical microscopy,optical communication,and other fields.Especially in the field of industrial processing,the Bessel beam plays an important role in the process of pore structures with the ratio of height to depth due to its long focal depth characteristics.For the preparation of large-area periodic pore micro-nano structures,the parallel processing method of the Bessel beam array can significantly improve the machining efficiency.The machining quality of materials is closely related to the quality of the light field of the Bessel beam array,so it is significant to study the generation method of Bessel beam array with high quality.The traditional Bessel beam array generation methods include:multi-axicon phase serial superposition method,Dammann grating,and axicon phase superposition method,which can generate parallel and divergent Bessel beam array,respectively.However,the generated Bessel beam array has problems of poor uniformity and low diffraction efficiency.Therefore,two computational holography methods are proposed in this paper,which can generate high-quality parallel and divergent Bessel beam arrays respectively.Firstly,the computational hologram model of the proposed method is established,and the multi-axicon phase parallel splicing method is proposed,which effectively reduce the background noise of the optical field by improving the“aperture utilization ratio”of the window;The multi-lens and axicon phase superposition method is proposed,the multi-lens phase superposition method is used to generate multiple focus distributions on the observation plane,and then the beams of each focus are modulated into Bessel beams by superimposing axicon phase,thus forming Bessel beam array,the key of this method is the multi-lens phase superposition to generate multi-focus distributions with controllable position.Secondly,holograms of a 3×3 Bessel beam array are generated by the proposed method and the traditional method,and t

关 键 词：贝塞尔光束阵列 空间光调制器 相位叠加法 计算全息图 飞秒激光加工 

分 类 号：O439[机械工程—光学工程]