激光抛光技术研究进展与发展趋势  

Advancements and Developments of Laser Polishing Technology

作　　者：刘二举 徐杰[1,2] 陈曦 陈彦宾[2] 单德彬[1,2] 郭斌[1,2] Liu Erju;Xu Jie;Chen Xi;Chen Yanbin;Shan Debin;Guo Bin(Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education,Harbin Institute of Technology,Harbin 150080,Heilongjiang,China;School of Materials Science and Engineering,Harbin Institute of Technology,Harbin 150001,Heilongjiang,China)

机构地区：[1]哈尔滨工业大学微系统与微结构制造教育部重点实验室,黑龙江哈尔滨150080 [2]哈尔滨工业大学材料科学与工程学院,黑龙江哈尔滨150001

出　　处：《中国激光》2023年第16期92-110,共19页Chinese Journal of Lasers

基　　金：国家重点研发计划(2017YFB1105000);广东省重点领域研发计划(2018B090905003)。

摘　　要：近年来,制造业进入了新的发展时期,对表面抛光技术提出了新的要求,激光抛光技术的快速发展为表面抛光智能化高效化提供了新的途径。激光抛光技术具有无污染、应用广、抛光质量稳定和易实现自动化等优点,是一种极具发展前景的工业抛光技术。但是目前激光抛光技术还不够成熟,仍有一些技术难点亟待解决。从激光抛光机制、激光抛光工艺和激光抛光新技术等方面梳理了近年来激光抛光技术的发展现状,阐述了激光类型、材料特性、工艺参数、抛光机制和抛光质量等多个维度的相互关系,总结了激光抛光技术需要解决的问题,并浅析了激光抛光技术未来的发展趋势。Significance The traditional manufacturing sector is going through a scientific and technical revolution as a result of the rapid advancement of laser technology.Many countries have made significant investments in the research and development of new manufacturing models to achieve high-quality,high-efficiency,flexible automation,integration,and intelligent production.Surface polishing is a crucial step in the manufacturing of industrial products,and it has numerous applications in the domains of aviation,aerospace,automotive,mold,precision manufacturing,semiconductors,and other fields.Additionally,surface polishing quality also directly affects the appearance,performance,and service life of products.Current surface polishing methods like manual/mechanical,chemical/electrochemical,bonnet,abrasive flow,ion beam,and vibration polishing all have their advantages and are appropriate for particular applications;however,they are rarely intelligent or non-polluting and seldom have high quality or efficiency.Therefore,it is imperative to develop cutting-edge and effective surface polishing technologies to meet the strategic goals of reducing carbon emissions and realizing carbon neutrality as well as to support the advancement of the manufacturing industry in an environment friendly manner.Laser polishing is a novel surface polishing technology that has drawn much interest from researchers both domestically and internationally because it does not pollute,can process diverse objects,has steady polishing quality,and can be easily automated.During laser polishing,the laser melts and evaporates the surface layer of the polished material,driving the molten metal to valleys under the action of capillary or thermal capillary forces,resulting in a smooth surface.Laser polishing not only generates a smooth surface,but also improves the surface properties of the material.Furthermore,laser polishing is more suitable for industrial applications than traditional polishing technologies because it can be integrated to processes such as

关 键 词：激光技术 激光抛光 抛光机制 纳秒脉冲激光 表面形貌 粗糙度 

分 类 号：V261.8[航空宇航科学与技术—航空宇航制造工程]