Aluminum nitride waveguide beam splitters for integrated quantum photonic circuits  

作　　者：HYEONG-SOON JANG DONGHWA LEE HYUNGJUN HEO YONG-SU KIM HYANG-TAG LIM SEUNG-WOO JEON SUNG MOON SANGIN KIM SANG-WOOK HAN HOJOONG JUNG 

机构地区：[1]Center for Quantum Information,Korea Institute of Science and Technology(KIST),Seoul 02792,Republic of Korea [2]Department of Electrical and Computer Engineering,Ajou University,Suwon 16499,Republic of Korea [3]Division of Nano and Information Technology,KIST School,Korea University of Science and Technology,Seoul 02792,Republic of Korea

出　　处：《Photonics Research》2023年第7期1196-1202,共7页光子学研究（英文版）

基　　金：Korea Institute of Science and Technology (2E32241,2E32801);National Research Council of Science and Technology (CAP21031-200);Institute for Information and Communications Technology Promotion (2020-0-00947,2020-0-00972);National Research Foundation of Korea (2019M3E4A1079777,2021M1A2A2043892).

摘　　要：We demonstrate integrated photonic circuits for quantum devices using sputtered polycrystalline aluminum nitride(Al N)on insulator.On-chip Al N waveguide directional couplers,which are one of the most important components in quantum photonics,are fabricated and show the output power splitting ratios from 50:50 to 99:1.Polarization beam splitters with an extinction ratio of more than 10 d B are also realized from the Al N directional couplers.Using the fabricated Al N waveguide beam splitters,we observe Hong–Ou–Mandel interference with a visibility of 91.7%±5.66%.

关 键 词：WAVEGUIDE QUANTUM BEAM 

分 类 号：TN491[电子电信—微电子学与固体电子学]