光学非球面面形误差和参数误差干涉测量  

Interferometric Measurement of Optical Aspheric Surface Form Error and Parameter Error

作　　者：郝群 刘一鸣 胡摇 宁妍 王子琛 徐楚恒 董欣宇 刘源恒 Hao Qun;Liu Yiming;Hu Yao;Ning Yan;Wang Zichen;Xu Chuheng;Dong Xinyu;Liu Yuanheng(Beijing Key Laboratory for Precision Optoelectronic Measurement Instrument and Technology,School of Optics and Photonics,Beijing Institute of Technology,Beijing 100081,China)

机构地区：[1]北京理工大学光电学院精密光电测试仪器及技术北京市重点实验室,北京100081

出　　处：《光学学报》2023年第15期334-345,共12页Acta Optica Sinica

基　　金：科技部重点研发计划项目(2021YFC2202404);中国科学院战略性先导科技专项(XDA25020317);国家自然科学基金(51735002,51327005,61705008)。

摘　　要：光学非球面在先进光学系统中有着广泛的应用,其面形和参数的高精度测量是光学非球面加工和装调的基础。从面形误差和参数误差两类被测量的角度,阐述了各种典型的干涉测量方法,重点介绍了笔者在部分补偿法、数字莫尔干涉法中取得的成果,探讨了光学非球面干涉测量的发展前景和研究方向。Significance Asphere is a general term for surfaces deviating from a sphere.Different from spherical surfaces with similar curvature,the curvature of aspheric surfaces varies everywhere.Aspheric surfaces have higher degrees of freedom than spherical ones,allowing them to achieve more functions than spherical surfaces.In addition to correcting high-order aberrations and improving imaging quality,aspheric surfaces can reduce the sizes of optical systems by yielding effects that are only possible with multiple spherical mirrors.Employing aspheric surfaces can simultaneously improve image quality and reduce the volume of optical systems.As a result,optical designers are increasingly adopting aspheric surfaces in modern optical systems,such as biomedical,lithography,astronomical optics,and high-power laser systems.The measurement technique is vital in manufacturing aspheric surfaces.The measurement technique of the aspheric surface is mainly for the surface form and parameters,and both techniques can assess the aspheric surface quality.Interferometry is an efficient method widely applied in measuring aspheric surfaces in optical shops.Our paper reviews the interferometric measurement of optical aspheric surface form and parameter error,with attention to the research on partial compensation and digital Moiréinterferometry.Additionally,the future trend of interferometric measurement technology for optical aspheric surfaces is discussed.Progress According to whether the interferometer can obtain the null interferogram,the surface form measurement technique can be divided into two categories of null interferometry and non-null interferometry.Null interferometry includes the no-aberration point method and compensation method.The no-aberration point method is widely adopted to measure quadratic surfaces but cannot be utilized to measure high-order aspheric surfaces.The compensation method is implemented by an interferometric system with a compensator or computer-generated hologram(CGH)and has been widely applied to measure

关 键 词：干涉法 非球面 面形误差 参数误差 

分 类 号：TH741[机械工程—光学工程]