角度分辨光谱技术及其应用  

Angle-Resolved Spectroscopy and Its Applications

作　　者：赵景怡 赵茂雄 石磊 资剑[1,2] Zhao Jingyi;Zhao Maoxiong;Shi Lei;Zi Jian(State Key Laboratory of Surface Physics,Fudan University,Shanghai 200433,China;Key Laboratory of Micro-and Nano-Photonic Structures,Ministry of Education,Fudan University,Shanghai 200433,China;Shanghai Engineering Research Center of Optical Metrology for Nano-Fabrication,Shanghai 200433,China;Fudan University-Enterprise Joint Research Center for Optic Detection and Optic Integration,Shanghai 200433,China)

机构地区：[1]复旦大学应用表面物理国家重点实验室,上海200433 [2]复旦大学微纳光子结构教育部重点实验室,上海200433 [3]上海微纳制程智能检测工程技术研究中心,上海200433 [4]复旦大学-光检测与光集成校企联合研究中心,上海200433

出　　处：《光学学报》2023年第16期253-276,共24页Acta Optica Sinica

基　　金：中国博士后科学基金会(BX20220093);上海市科技委员会(19DZ2253000,19XD1434600,2019SHZDZX01,20501110500,21DZ1101500);国家自然科学基金(91963212,12221004,12234007);国家重点研发计划(2021YFA1400603,2022YFA1404800);上海市青年科技启明星扬帆专项项目(23YF1415300)。

摘　　要：光谱是物质的光学指纹信息,是研究光与物质相互作用的重要手段。角度分辨光谱技术是对光谱在角度维度的进一步解析,能够分辨光的强度、偏振态和相位等信息,从而在生物医学、材料科学和微纳光子学等研究领域得到广泛应用。为了实现角度分辨光谱,目前已经开发了多种实验系统,并涌现出了大量数据处理算法。本文将介绍角度分辨光谱的生成方法、数据处理技术及其在不同研究领域中的应用。Significance Optical scattering provides researchers with a wealth of information,including light intensity,phase,and polarization.Angle-resolved spectroscopy(ARS)is a powerful technique that measures the distribution of light intensity with angles or wavelengths.It plays a crucial role in obtaining important optical information to solve optical inverse problems and represent the properties of micro-nanophotonic materials.In optical inverse problems,ARS assists researchers in determining the morphological structures and optical constants of materials by analyzing the angle-dependent behaviors of scattered light.This technique is particularly helpful when traditional measurement methods,such as scanning electron microscopy(SEM)and atomic force microscopy(AFM),are not feasible.By solving optical inverse problems using ARS and inverse algorithms,researchers can gain a deeper understanding of the behavior of light in complex materials and systems.Additionally,it finds wide application in the semiconductor industry to detect defects in wafers and measure optical critical dimensions of optoelectronic components.ARS also enables researchers to represent the properties of micro-nanophotonic materials.It plays a crucial role in photonic crystal and metamaterial research.By measuring the angular dependence of light scattered or emitted by these materials,researchers can gain insights into their unique optical properties,such as band structure,dispersion,capabilities of light field regulation,and photonic density of states.This information is essential for designing and optimizing these materials for various applications,such as sensing,imaging,and light manipulation.Furthermore,the ability to control and manipulate light at the nanoscale has the potential to revolutionize photonics and enable the development of new technologies.Therefore,ARS is a powerful technique for investigating optical inverse problems and harnessing the optical properties of micro-nanophotonic materials.In recent years,various methods have emerged fo

关 键 词：角度分辨光谱 光学逆散射问题 光学散射成像 光学特征尺寸 缺陷检测 

分 类 号：O436[机械工程—光学工程]