基于钛酸盐敏感电极的混合位型SO_(2)传感器研究  

Study on mixed potential SO_(2)sensor based on titanate sensitive electrode

作　　者：常祎露 王岭 戴磊 李跃华 孟维薇 CHANG Yilu;WANG Ling;DAI Lei;LI Yuehua;MENG Weiwei(College of Chemical Engineering,North China University of Science and Technology,Tangshan 063200,China)

机构地区：[1]华北理工大学化学工程学院,河北唐山063200

出　　处：《传感器与微系统》2023年第10期5-8,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(62241104);河北省自然科学基金资助项目(B2009018);唐山市科技计划资助项目(21130214C,213012G);唐山市人才资助项目(A202202006);河北省省属高等学校基本科研业务费研究资助项目(JQN2022012)。

摘　　要：采用溶胶凝胶法合成了系列钛酸盐(ZnTiO_(3)、SrTiO_(3)、NiTiO_(3)),并将其作为敏感电极,同时以钇稳定的氧化锆(YSZ)为固体电解质制备了混合电位型二氧化硫(SO_(2))传感器用于高温下SO_(2)体积分数的在线监测。敏感电极的相组成和传感器的微观形貌分别采用X射线衍射仪(XRD)和配备了能谱仪(EDS)的扫描电镜(SEM)表征。敏感性能测试结果表明:在系列钛酸盐当中,NiTiO_(3)敏感电极表现出更佳的敏感性能,其在400~500℃的温度范围内,可以有效检测3×10^(-6)~30×10^(-6)的SO_(2),传感器的响应值与SO_(2)体积分数的对数之间呈现良好的线性关系。此外,传感器表现出优异的重现性和抗干扰性能。A series of titanates(ZnTiO_(3),SrTiO_(3),NiTiO_(3))are synthesized by sol-gel method,and titanates as sensitive electrodes while a mixed potential SO_(2)sensor is fabricated using yttria-stabilized zirconia(YSZ)as solid electrolyte for online monitoring of volume fraction of SO_(2)at high temperatures.The phase composition of the sensitive electrode and the microscopic morphology of the sensor are characterized by X-ray diffraction(XRD)and scanning electron microscopy(SEM)equipped with an energy dispersive spectrometer(EDS),respectively.Test result of sensitive property shows that the NiTiO_(3)sensitive electrode show better sensitive performance among the series of titanates,and it is successfully able to detect volume fraction of 3×10^(-6)~30×10^(-6)of SO_(2)in the temperature range of 400~500℃.Response value of the sensor shows good linear relation with the volume fraction of SO_(2).In addition,the sensor shows excellent repeatability and immunity to interference.

关 键 词：二氧化硫传感器 混合位型 NiTiO_(3)敏感电极 灵敏度 抗干扰性能 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置] X511[自动化与计算机技术—控制科学与工程]