一种用于高精度环规内径测量的激光三角法位移测量系统设计  

Design of Laser Triangulation Displacement Measurement System for High Precision Inner Diameter Measurement of Ring Gauge

作　　者：吴新峰 华志超 WU Xinfeng;HUA Zhichao

机构地区：[1]泰州市计量测试院

出　　处：《计量与测试技术》2023年第9期75-77,共3页Metrology & Measurement Technique

摘　　要：环规的内径测量是保证环规是否满足正常使用要求的重要手段,而传统的接触式环规内径测量方法容易对被测件表面形成破坏。本文提出一种基于激光三角法的环规内径测量方法,并对其位移测量系统进行设计。结果表明:该系统的理论测量精度可达到±0.2um,且相对光谱共焦位移传感器具有价格低、实施简单等特点,具有一定推广价值。The inner diameter measurement of ring gauge is an important means to ensure whether the ring gauge meets the requirements of normal use,but the traditional contact ring gauge inner diameter measurement method is easy to damage the surface of the measured part.In this paper,a method of measuring inner diameter of ring gauge based on laser triangulation is presented,and its displacement measuring system is designed.The results show that the theoretical measurement accuracy of the system can reach±0.2um,and the relative spectral confocal displace⁃ment sensor has the characteristics of low price and simple implementation,so it has certain popularization value.

关 键 词：激光三角法 内径 

分 类 号：TN249[电子电信—物理电子学]