一种5倍暗场金相物镜的设计  

作　　者：张燕珂[1] 陈炯伟 戴科恒 金泽康 胡华杰 

机构地区：[1]浙江工商职业技术学院,浙江宁波315012

出　　处：《科技创新与应用》2023年第28期125-128,共4页Technology Innovation and Application

基　　金：浙江省教育厅一般科研项目(Y202147762)。

摘　　要：为解决现有5倍暗场金相物镜照明亮度低且不均匀的问题,采用一体化设计新方法。首先通过选择光学结构,在光学设计软件ZEMAX中合理设置操作数,利用光学软件设计优化出光学系统;然后依据暗场照明约束条件设置反射光线,利用CAD软件设计出反射曲面。通过光学传递函数、暗场照明光束利用率、光斑尺寸和光斑均匀度等参数对物镜性能进行评价。结果表明新5倍暗场金相物镜像质优良、视场明亮均匀,新的设计方法可行。In order to solve the problem of low brightness and uneven illumination of the existing 5-fold dark field metallographic objective lens,a new integrated design method is adopted.Firstly,the optical system is optimized by selecting the optical structure and setting the operands reasonably in the optical design software ZEMAX,then the reflected light is set according to the dark field lighting constraints,and the reflection surface is designed by using CAD software.The performance of the objective lens is evaluated by optical transfer function,dark field illumination beam utilization,spot size,spot uniformity and other parameters.The results show that the image quality of the new 5-fold dark field metallographic object is excellent,the field of view is bright and uniform,and the new design method is feasible.

关 键 词：暗场 金相物镜 ZEMAX 光学传递函数 光学系统 

分 类 号：TH742[机械工程—光学工程]