电镀镍膜应变的磁巴克豪森噪声试验表征  

Experimental characterization of magnetic Barkhausen noise on the strain of electroplated nickel film

作　　者：韩新阳 康静伟 王楠[1] 刘秀成[1] 何存富[1] HAN Xinyang;KANG Jingwei;WANG Nan;LIU Xiucheng;HE Cunfu(Faculty of Materials and Manufacturing,Beijing University of Technology,Beijing 100124,China)

机构地区：[1]北京工业大学材料与制造学部,北京100124

出　　处：《无损检测》2023年第7期1-6,84,共7页Nondestructive Testing

基　　金：国家自然科学基金(11872081,12122201)。

摘　　要：探讨了紫铜基板表面电镀镍膜拉应变的磁巴克豪森噪声测试和表征方法。首先,构建了能够同步测量电镀镍膜拉伸过程中应变和磁巴克豪森噪声信号的试验装置,获得了不同厚度镍膜中表面切向磁场强度信号,以及不同应变条件下的磁巴克豪森噪声,并从两种信号中筛选出对镍膜厚度、应变敏感的特征磁参量;最后,通过方程拟合分析了特征磁参量对镍膜厚度、拉应变的定量表征能力。结果表明,随着镍膜厚度增加,切向磁场强度的基波幅值(A_(1))呈现良好线性下降趋势;磁巴克豪森噪声特征参量(M_(max)或M_(mean))和拉应变的依赖关系服从指数型衰减函数关系。通过组合两种信号的特征参量,可以实现镍膜厚度和拉应变的定量检测。The magnetic Barkhausen noise method was used to measure and characterize the tensile strain of electroplated nickel film on red copper substrate.First of all,an experimental device was built to synchronously measure the strain and magnetic Barkhausen noise signals during the tensile process of electroplated nickel film;Secondly,the tangential magnetic field intensity signals on the surface of nickel films with different thicknesses and the magnetic Barkhausen noise under different strain conditions were obtained,and the characteristic magnetic parameters sensitive to the thickness and strain of nickel films were selected from the two signals;Finally,the quantitative characterization ability of characteristic magnetic parameters to nickel film thickness and tensile strain was analyzed by equation fitting.The results showed that the amplitude of fundamental wave(A_(1))of tangential magnetic field intensity decreased linearly with the increase of nickel film thickness;Dependence of the characteristic parameters of the magnetic Barkhausen noise(M_(max)or M_(mean))on tensile strain obeyed exponential decay function.By combining the characteristic parameters of the two signals,the quantitative measurement of nickel film thickness and tensile strain can be realized.

关 键 词：电镀镍膜 拉应变 厚度 磁巴克豪森噪声 定量表征 

分 类 号：TG115.28[金属学及工艺—物理冶金]