氦吸附对真空箱氦检精度的影响及优化研究  

Influence of Helium Adsorption on Helium Detection Accuracy of Vacuum Box and Optimization Study

作　　者：刘善民 陶丽 李红梅 王贵强 LIU Shanmin;TAO Li;LI Hongmei;WANG Guiqiang(Chongqing Hongyu Precision Industrial Co.,Ltd.,Chongqing 402760,China)

机构地区：[1]重庆红宇精密工业集团有限公司,重庆402760

出　　处：《自动化应用》2023年第19期122-123,127,共3页Automation Application

摘　　要：系统开发、氦检漏率、不同氦检方法是氦质谱检漏研究的重点。针对氦检系统本底值过高这一实际课题,本文验证了真空箱氦检中的氦吸附,同时从真空箱、密封件、阀件等方面提出了优化措施。结果表明,氦吸附会降低氦检精度,将合格品错判成不合格品。System development,helium leak detection rate,and different helium detection methods are the focus of helium mass spectrometry leak detection research.For the practical subject of high background value of helium detection system,this paper verifies the helium adsorption in helium detection of vacum box,and at the same time proposes optimization measures from the aspects of vacuum box,seals and valve parts.The results show that helium adsorption reduces the accuracy of helium checking and misjudges qualified products as unqualified products.

关 键 词：变矩器 真空箱 氦检精度 氦吸附 

分 类 号：TB774[一般工业技术—真空技术]