基于脉冲激光技术的光学元件表面损伤检测方法  

Surface damage detection method of optical components based on pulse laser technology

作　　者：鄢圣杰 王如意 YAN Shengjie;WANG Ruyi(School of Intelligent Manufacturing and Electrical Engineering Guangzhou Institute of Science and Technology,Guangzhou 510540,China)

机构地区：[1]广州理工学院智能制造与电气工程学院,广州510540

出　　处：《激光杂志》2023年第9期75-79,共5页Laser Journal

基　　金：广东省教育厅青年创新人才项目(No.2019KQNCX219)。

摘　　要：针对当前光学元件表面损伤检测方法检测准确性低的问题,设计基于脉冲激光技术的光学元件表面损伤检测方法。计算光学材料对激光辐射的吸收参数,确定光散射强度,计算高斯光斑内损伤点的能量密度,建立由缺陷密度和损伤阈值组成的缺陷分析模型,并对各个能量密度区的损伤进行了综合处理,得出了各个区域的损伤程度。实验结果表明,所提方法的平均裂缝宽度检测误差为0.16 mm,平均裂缝深度检测误差为0.12 mm。Aiming at the low accuracy of current optical element surface damage detection methods,a method based on pulsed laser technology for optical element surface damage detection is designed.The absorption parameters of optical materials to laser radiation are calculated,the light scattering intensity is determined,the energy density of damage points in the Gaussian light spot is calculated,the defect analysis model consisting of defect density and damage threshold is established,and the damage in each energy density area is comprehensively processed to obtain the damage degree of each area.The experimental results show that the average crack width detection error of the proposed method is 0.16 mm,and the average crack depth detection error is 0.12 mm.

关 键 词：脉冲激光 光学元件损伤 损伤层 聚焦入射 

分 类 号：TN244[电子电信—物理电子学]