A platform for integrated spectrometers based on solution-processable semiconductors  

作　　者：Yanhao Li Xiong Jiang Yimu Chen Yuhan Wang Yunkai Wu De Yu Kaiyang Wang Sai Bai Shumin Xiao Qinghai Song 

机构地区：[1]Ministry of Industry and Information Technology Key Lab of Micro-Nano Optoelectronic Information System,Guangdong Provincial Key Laboratory of Semiconductor Optoelectronic Materials and Intelligent Photonic Systems,Harbin Institute of Technology(Shenzhen),Shenzhen,Guangdong 518055,China [2]Institute of Fundamental and Frontier Sciences,University of Electronic Science and Technology of China,Chengdu,Sichuan 611731,China [3]Collaborative Innovation Center of Extreme Optics,Shanxi University,Taiyuan,Shan`xi 030006,China

出　　处：《Light(Science & Applications)》2023年第9期1739-1748,共10页光（科学与应用)（英文版）

基　　金：supported by the National Natural Science Foundation of China(grant No.11974092,60805058,62204069);the Shenzhen Fundamental research project(grant No.JCYJ20210324120402006,JCYJ20180306171700036,JCYJ20210324131206018,RCYX20221008092847060,and GXWD20220811163751003);the GuangDong Basic and Applied Basic Research Foundation(grant No.2022A1515011464,and 2023B1515020032);the Young Science&Technology Talent Training Program of Guangdong Provincial Association for Science&Technology(grant No.SQ440000220818002097)。

摘　　要：Acquiring real-time spectral information in point-of-care diagnosis,internet-of-thing,and other lab-on-chip applications require spectrometers with hetero-integration capability and miniaturized feature.Compared to conventional semiconductors integrated by heteroepitaxy,solution-processable semiconductors provide a much-flexible integration platform due to their solution-processability,and,therefore,more suitable for the multi-material integrated system.However,solution-processable semiconductors are usually incompatible with the micro-fabrication processes.This work proposes a facile and universal platform to fabricate integrated spectrometers with semiconductor substitutability by unprecedently involving the conjugated mode of the bound states in the continuum(conjugated-BIC)photonics.Specifically,exploiting the conjugated-BIC photonics,which remains unexplored in conventional lasing studies,renders the broadband photodiodes with ultra-narrowband detection ability,detection wavelength tunability,and on-chip integration ability while ensuring the device performance.Spectrometers based on these ultra-narrowband photodiode arrays exhibit high spectral resolution and wide/tunable spectral bandwidth.The fabrication processes are compatible with solution-processable semiconductors photodiodes like perovskites and quantum dots,which can be potentially extended to conventional semiconductors.Signals from the spectrometers directly constitute the incident spectra without being computation-intensive,latency-sensitive,and error-intolerant.As an example,the integrated spectrometers based on perovskite photodiodes are capable of realizing narrowband/broadband light reconstruction and in-situ hyperspectral imaging.

关 键 词：SEMICONDUCTORS process INTEGRATION 

分 类 号：TN3[电子电信—物理电子学]