SnTe纳米薄膜的椭圆偏振光谱研究  

Study on spectral ellipsometry of SnTe nanofilm

作　　者：宋立媛 唐利斌[1,2,3] 王善力 郝群[1] 孔令德[2] 李俊斌[2] SONG Li-Yuan;TANG Li-Bin;WANG Shan-Li;HAO Qun;KONG Ling-De;LI Jun-Bin(The Laboratory of Photonics Information Technology,Ministry of Industry and Information Technology,School of Optics and Photonics,Beijing Institute of Technology,Beijing 100081,China;Kunming Institute of Physics,Kunming 650223,China;Yunnan Key Laboratory of Advanced Photoelectronic Materials&Devices,Kunming 650223,China)

机构地区：[1]北京理工大学光电学院信息光子技术工信部重点实验室,北京100081 [2]昆明物理研究所,云南昆明650223 [3]云南省先进光电材料与器件重点实验室,云南昆明650223

出　　处：《红外与毫米波学报》2023年第5期581-587,共7页Journal of Infrared and Millimeter Waves

基　　金：国家重点研发计划(2019YFB2203404)。

摘　　要：SnTe纳米薄膜材料光学常数的准确获取,对于其在高性能光电器件设计和在光电子领域的潜在应用具有重要的意义。然而,目前仍然很少有关于获取其纳米薄膜光学常数方法的相关研究报道。采用磁控溅射法以SnTe单靶为靶材,在石英衬底上制备了SnTe纳米薄膜;在未加衬底温度和未进行退火处理的条件下,通过制备工艺参数优化,即得到晶化的、组分可控的面心立方结构SnTe纳米薄膜。采用椭圆偏振光谱法,建立不同的拟合模型结构,利用SE数据库中的SnTe材料数据列表和Tauc-Laurents模型对所制备的SnTe纳米薄膜材料的膜厚、组成及折射率、消光系数等光学常数进行了研究。结果显示,具有该厚度的SnTe纳米薄膜材料在可见光波段具有较高的折射率、在可见到近红外具有较宽的光谱吸收。The accurate acquisition of optical constants of SnTe nanofilm is of great significance for the design of high-performance optoelectronic devices and their potential applications in the field of optoelectronics.However,there are still few reports about the methods to obtain the optical constants of the nanofilm.SnTe nanofilm was prepared on quartz substrate by magnetron sputtering with a SnTe single target.Under the conditions of with no heating of the substrate and annealing treatment,using the appropriate process parameters,a crystalline and compositionally controlled face-centered cubic SnTe nanofilm has been obtained.The thickness,composition,refractive index,extinction coefficient and other optical constants of SnTe nanofilm were studied by using spectral ellipsometry(SE).Different fitting model structures were established.SnTe material data lists in SE database and the Tauc-Laurents model were used for fitting analysis respectively.The results show that the SnTe nanofilm with such thickness has a higher refractive index in the visible band and a wider spectral absorption from visible to near infrared.

关 键 词：SnTe纳米薄膜 椭圆偏振光谱 光学常数 

分 类 号：O434.3[机械工程—光学工程]