基于人工微结构的光谱选择性红外热敏探测器  

Spectrally selective infrared thermal detectors based on artificially engineered nanostructures

作　　者：谈冲 孙艳[1] 戴宁[1] 郝加明[1,2] TAN Chong;SUN Yan;DAI Ning;HAO Jia-Ming(State Key Laboratory of Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China;Shanghai Frontiers Science Research Base of Intelligent Optoelectronics and Perception and Institute of Optoelectronics,Fudan University,Shanghai 200433,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院上海技术物理研究所红外物理国家重点实验室,上海200083 [2]复旦大学光电研究院,上海市智能光电与感知前沿科学研究基地,上海200433 [3]中国科学院大学,北京100049

出　　处：《红外与毫米波学报》2023年第5期594-610,共17页Journal of Infrared and Millimeter Waves

基　　金：国家重点研发计划项目(2022YFA1404701,2017YFA0205800);国家自然科学基金项目(62075231);上海市科委项目(20JC1414603)。

摘　　要：红外热敏探测器不管是在军事还是在民用领域都有着非常重要的应用。传统的红外热敏探测器主要采用宽光谱吸收的方式,这虽然赋予了器件宽带响应的特点,但同时也会因为引入了不必要的辐射热导而增加本底噪声,从而限制了器件的探测性能极限。研究表明,具有窄带选择性吸收的热敏探测器在特定的条件下可以突破这一极限。经过精心设计的人工微纳结构不但可以实现波长选择性吸收来降低器件的辐射热导,而且由于其具有亚波长特性,还可以大大降低器件的热容,从而为实现高性能的红外热敏探测器提供了可能性。本文在简单介绍红外探测器基本概念的基础上,聚焦测辐射热计、温差电偶和热释电探测器件,回顾总结基于人工微结构体系的光谱选择性红外热敏探测器的相关研究进展。Infrared thermal detectors are of significant importance in both military and civilian fields.Traditional infrared thermal detectors usually have broadband absorption characteristics,although which brings the detectors featuring broadband responses,it also increases the noise due to the presence of additional radiative thermal conductance,thus limiting the detection performance.Recently,it has been demonstrated that thermal detectors assisted by artificially engineered structures would have performance beyond traditional broadband thermal detectors,since such elaborately designed media can not only reduce the thermal conductance of the detectors by spectrally suppressing the undesirable thermal emission,but also decrease the thermal capacitance due to their subwavelength features,and thus improving the performance of the thermal detectors.In this review,we first give a brief overview of the fundamental concepts of infrared detectors,including bolometric,thermoelectric and pyroelectric detectors,and then summarize the recent developments of spectrally selective infrared thermal detectors based on artificially engineered nanostructures.

关 键 词：热敏探测器 光谱选择性 人工微结构 超构表面 

分 类 号：O436[机械工程—光学工程] TN215[理学—光学]