芯片用电子化学品制造关键技术研究与工业应用  

Research and industrial applications of key technologies of themanufacture of electronic chemicals for chips

作　　者：靳瑞华 袁星 李群生[1,2] Rui-Hua Jin;Xing Yuan;Qun-Sheng Li(College of Chemical Engineering,Beijing University of Chemical Technology,Beijing 100029,China;Engineering Research Center for Preparation Technology of High Purity Chemicals for Integrated Circuits,Ministry of Education,Beijing 100029,China)

机构地区：[1]北京化工大学化学工程学院,北京100029 [2]教育部集成电路高纯化学品制备技术工程研究中心,北京100029

出　　处：《中国科学：化学》2023年第10期1853-1865,共13页SCIENTIA SINICA Chimica

基　　金：国家重点研发计划(编号:2022YFC2106301)。

摘　　要：芯片是制造业强国的重要基石,电子化学品是芯片制造的核心材料,晶圆、光刻、刻蚀等全产业链离不开高纯电子化学品.本文介绍了高效分离元器件——BH填料的结构、性能以及在高纯电子化学品分离提纯中的应用.BH填料具有独特的折线式结构,其分离性能显著优于传统填料,成功工业化应用,生产出以电子级二氯二氢硅为代表的多种电子级化学品,并展望了未来的发展前景.The chip is an important cornerstone of manufacturing power.Electronic chemicals are the core materials of chip manufacturing,wafer,lithography,etching and the whole industry chain is inseparable from high-purity electronic chemicals.In this paper,an efficient separation component,BH filler,has a unique broken line structure,and its separation performance is significantly better than that of traditional fillers.The successful industrial application has produced a variety of electronic grade chemicals represented by electronic grade dichlorodihydrosilane,and the future development prospect is discussed.

关 键 词：分离提纯 精馏 BH型填料 电子化学品 芯片 

分 类 号：TN405[电子电信—微电子学与固体电子学] TQ072[化学工程]