基于电化学微加工技术的多元兼容集成制造工艺及其应用  

Multi-compatible integrated manufacturing process and applicationsbased on electrochemical micromachining technology

作　　者：蔡涵 李洪涛[1,2] 孙云娜 王艳[1] 汪红[1] 丁桂甫[1] Han Cai;Hongtao Li;Yunna Sun;Yan Wang;Hong Wang;Guifu Ding(National Key Laboratory of Advanced Micro and Nano Manufacture Technology,Shanghai Jiao Tong University,Shanghai 200240,China;School of Electronic Information and Electrical Engineering,Shanghai Jiao Tong University,Shanghai 200240,China)

机构地区：[1]上海交通大学先进微纳加工技术国家级重点实验室,上海200240 [2]上海交通大学电子信息与电气工程学院,上海200240

出　　处：《中国科学：化学》2023年第10期1954-1969,共16页SCIENTIA SINICA Chimica

基　　金：国家重点基础研究发展规划(编号:2021YFB2022800);国家自然科学基金(编号:62104141)资助项目。

摘　　要：随着摩尔定律日益趋近其发展极限,高集成、多功能微机电系统(MEMS)器件为智能化应用的发展提供持续不竭的动力.若要实现兼容更多功能部件的系统集成,关键是要突破多元材料、复杂结构难以异质异构集成制造的工艺难题.基于电化学微加工的多元兼容集成制造技术,以其低温且易于集成的工艺属性展现了材料多样性、结构多样性和工艺多样性兼容集成的潜力,提供了有效解决上述难题的优势技术途径,为面向重大需求的高性能、智能化、微型化的MEMS器件奠定技术基础.本文对典型MEMS微加工技术的兼容性进行分析,阐述基于电化学微加工技术的多元兼容集成制造工艺的技术内涵、发展潜力、关键技术和阶段成果,并进一步探讨了后续发展亟需解决的基础科学问题.With the development of Moore’s law gradually approaching its limit,highly integrated and multifunctional micro-electro-mechanical systems(MEMS)devices have provided continuous motivation for intelligent applications.To realize the system integration compatible with more functional components,it is crucial to break through the difficulty of heterogeneous manufacturing,multiple materials and complex structures.Multi-compatible integrated manufacturing technology is based on electrochemical micromachining,reducing the fabrication temperature and facilitating the integration process.It demonstrates the potential for integrating diverse materials,structures,and processes.Meanwhile,it provides an effective solution to the above challenges,laying a technical foundation for fabrication of highperformance,intelligent,and miniaturized MEMS devices with significant demand.This article analyzes the compatibility of typical MEMS fabrication technologies,introduces the technical connotation,development potential,key technologies,and stage achievements of multi-compatible MEMS-integrated manufacturing processes,and further explores the fundamental issues need to be addressed in the future.

关 键 词：电化学微加工 多元兼容集成制造 MEMS微加工技术 掩膜电镀 功能器件系统集成 

分 类 号：TN405[电子电信—微电子学与固体电子学]