可控型静压气体密封结构参数对密封性能的影响实验研究  

Experimental study on influence of structural parameters on performance of controllable static pressure dry gas seal

作　　者：闫欣欣 郑娆[1] 李双喜[1] 贾宇宁 陈杨 李梦竹 张敬博 YAN Xinxin;ZHENG Rao;LI Shuangxi;JIA Yuning;CHEN Yang;LI Mengzhu;ZHANG Jingbo(School of Mechanical and Electrical Engineering,Beijing University of Chemical Technology,Beijing 100029,China;Shanghai Tianma Microelectronics Co.,Ltd.,Shanghai 201201,China;System Engineering Research Institute,China Shipbuilding Corporation,Beijing 100094,China;Beijing North Huachuang Microelectronics Equipment Co.,Ltd.,Beijing 100176,China)

机构地区：[1]北京化工大学机电工程学院,北京100029 [2]上海天马微电子有限公司,上海201201 [3]中国船舶集团有限公司系统工程研究院,北京100094 [4]北京北方华创微电子装备有限公司,北京100176

出　　处：《机电工程》2023年第10期1483-1492,共10页Journal of Mechanical & Electrical Engineering

基　　金：国家重点研发计划项目(2018YFB2000800)。

摘　　要：可控型静压密封具有泄漏量低、开启力高和气膜刚度大的特点。但由于运行时的工况条件不断发生变化,可控型静压密封也存在泄漏失效问题。针对可控型静压密封在恒定转速和被密封介质压力下的泄漏问题,建立了可控型静压密封气膜流场模型,针对不同结构参数下的可控型静压密封性能进行了研究,揭示了结构参数对可控型静压密封的影响机理。首先,根据可控型静压密封原理,确定了泄漏量、气膜厚度、气膜刚度为密封性能参数;然后,采用了有限元方法,建立了可控型静压密封的分析模型,确定了研究的工况参数,设计了数值模拟分析的计算研究路线,通过计算获得了可控型静压密封的密封性能随节流孔、均压槽、端面宽度参数的变化趋势和规律;最后,自主设计了一套可控型静压密封试验装置,并进行了装置的运转试验,通过测量可控型静压密封的总泄漏量,对数值模拟结果的准确性进行了验证,得到不同结构参数对可控型静压密封泄漏量的影响规律。研究结果表明:当静压密封装置的节流孔数量在8个~12个,直径在0.15 mm~0.25 mm之间,均压槽位置距离密封内侧约0.5 mm处,端面宽度控制在23 mm~27 mm范围内时,可控型静压密封装置具有最优的密封性能。Controllable hydrostatic seal has the characteristics of low leakage,high opening force and high gas film stiffness.However,due to the changing working conditions during operation,the controllable hydrostatic seal also has the problem of leakage failure.Aiming at the leakage problem of controllable hydrostatic seal under constant rotating speed and pressure of sealed medium,the gas film flow field model of controllable hydrostatic seal was established,and the performance of controllable hydrostatic seal under different structural parameters was studied,the influence mechanism of structural parameters on controllable hydrostatic seal was revealed.Firstly,according to the principle of controllable hydrostatic seal,the leakage,thefilm thickness and thefilm stiffness were determined as thesealing performance parameters.Then,the finite element method was used to establish the controllable hydrostatic seal analysis model,determine the working condition parameters of the study,and design the numerical simulation analysis and calculation research route,and calculate the change trend and law of the sealing performance of the controllable hydrostatic seal with the throttle hole,thepressure groove,and the end face width parameters.Finally,a set of controllable hydrostatic seal test device was designed independently,and the operation test of the device was carried out.By measuring the total leakage of controllable hydrostatic seal,the accuracy of numerical simulation results was verified,and the influence law of different structural parameters on the leakage of controllable hydrostatic seal was obtained.The results show that the number of throttling holes is 8~12,the diameter is between 0.15 mm~0.25 mm,the position of the pressure groove is about 0.5 mm away from the inner side of the controllable hydrostatic seal,and the end face width is controlled within the range of 23 mm~27 mm.The controllable hydrostatic seal has the optimal sealing performance.

关 键 词：非接触型密封 可控型静压密封 泄漏失效 密封性能参数 数值模拟 节流孔 均压槽 端面宽度 

分 类 号：TH136[机械工程—机械制造及自动化]