高纯净材料的发展及纯度分析方法  

Development trend and purity analysis methods of high purity materials

作　　者：黄秀[1] 范博文[1] 李铭 邢志[1] 周文斌 HUANG Xiu;FAN Bowen;LI Ming;XING Zhi;ZHOU Wenbin(Department of Chemistry,Tsinghua University,Beijing 100084,China;Beijing TMS Analysis Technology Co.,Ltd.,Beijing 101318,China;Beijing Color Spectrum Instrument Co.,Ltd.,Beijing 101407,China)

机构地区：[1]清华大学化学系,北京100084 [2]北京清质分析技术有限公司,北京101318 [3]北京彩谱仪器有限公司,北京101407

出　　处：《实验技术与管理》2023年第8期1-6,共6页Experimental Technology and Management

摘　　要：材料是制造业的基础,高端材料是制造业升级的最重要环节之一,关键高端新材料是未来高新技术产业发展的基石和先导。材料的纯净化对科技和制造业的影响巨大,是材料发展的必然趋势。该文阐述了高纯净材料的应用前景、意义、发展趋势,及其纯度分析的主要方法。高科技的进一步发展很大程度上取决于制造新功能器件所需的高纯净材料的可用性,材料的进一步纯化已被视为半导体、航空航天、新能源、医疗器械等领域当今及未来的重要战略技术储备。高纯净材料的纯度分析与表征是其纯化工艺中的一个重要环节,对材料性质研究和工艺改进至关重要。该文论述了中子活化法、残余电阻率法、发射光谱法、电感耦合等离子体质谱法、火花源质谱法、辉光放电质谱法、二次离子质谱法等不同固体样品分析技术的特点。在缺乏高纯度标准样品的情况下,研究并确定分析过程中各种物理现象、材料特性、基质效应等溯源量化因子,将会是固体样品分析技术发展的重要方向之一。Materials are the foundation of the manufacturing industry,and high-end materials are one of the most important keys in the upgrading of the manufacturing industry.The key high-end new materials are the cornerstone and forerunner of the development of high-tech industry in the future.The purification of materials has great influence on technology and manufacturing industry,which is the inevitable trend of material development.Therefore,this review discussed the application prospect,significance,development trend and main purity analysis methods of high purity materials.The further development of high technology largely depends on the availability of high purity materials of new functional devices.The further purification of materials has been regarded as an important strategic technology reserve for now days and future in semiconductor,aerospace,new energy,medical devices and other fields.The purity analysis and characterization of high-purity materials is an important step in their purification process,which is crucial for the study of material properties and process improvement.The characteristics of different solid sample analysis techniques such as neutron activation,residual resistivity,emission spectrometry,inductively coupled plasma mass spectrometry,spark source mass spectrometry,glow discharge mass spectrometry and secondary ion mass spectrometry are discussed in this paper.In the absence of high purity standard reference materials,it will be one of the important directions in the development of solid sample analysis technology to study the traceability and quantification factors of various physical phenomena,material properties and matrix effects in the analysis process.

关 键 词：高纯净材料 纯化 纯度分析 材料发展 

分 类 号：TG14[一般工业技术—材料科学与工程] O657[金属学及工艺—金属材料]