路径导引的四波横向剪切干涉波前重构方法  

Quadri-Wave Lateral Shearing Interference Wavefront Reconstruction Based on Path Guidance

作　　者：闵星植 段亚轩[1,3] 王拯洲 陈晓义[1,3] 唐志愿 王璞 范尧 Min Xingzhi;Duan Yaxuan;Wang Zhengzhou;Chen Xiaoyi;Tang Zhiyuan;Wang Pu;Fan Yao(Advanced Optical Instrument Research Department,Xi'an Institute of Optics and Precision Mechanics,Chinese Academy of Sciences,Xi'an 710119,Shaanxi,China;University of Chinese Academy of Science,Beijing 100049,China;Xi'an Key Laboratory of High Power Laser Measurement Technology and Instrumentation,Xi'an 710119,Shaanxi,China)

机构地区：[1]中国科学院西安光学精密机械研究所先进光学仪器研究室,陕西西安710119 [2]中国科学院大学,北京100049 [3]西安市高功率激光测量技术与仪器重点实验室,陕西西安710119

出　　处：《中国激光》2023年第18期261-269,共9页Chinese Journal of Lasers

基　　金：国家自然科学基金(61705254);国家重点研发计划(2021YFC2203501);陕西省重点研发计划(2020GY-114)。

摘　　要：为了解决区域法在四波横向剪切干涉波前重构过程中噪声误差沿积分路径累积影响波前重构精度的问题,本文提出了一种路径导引的四波横向剪切干涉波前重构方法。首先分析了噪声环境下无积分路径导引的区域法波前重构存在噪声误差累积的缺陷,然后在此基础上建立了基于差分相位导数偏差的积分路径评价图模型,并给出了基于积分路径导引的波前重构算法流程。为了验证所提方法的有效性,本文进行了理论仿真研究,结果表明在不同信噪比噪声下所提方法能有效地阻止噪声误差的传播和累积。搭建了基于纯相位型液晶空间光调制器的实验验证装置,实验结果表明:所提方法重构波前与理论波前残差的RMS相比无积分路径导引区域法重构波前与理论波前残差的RMS降低了39.7%,且所提方法重构波前PV值与理论波前PV值的偏差相对无积分路径导引区域法重构波前PV值与理论波前PV值的偏差减小了1.6943λ。所提方法可为提高噪声环境下四波横向剪切干涉波前重构精度提供一种有效方法。Objective The accuracy of a quadri-wave lateral shearing interferometer is directly affected by the accuracy of the wavefront reconstruction.Traditional wavefront-reconstruction methods include modal and zonal methods.The modal method expands the wavefront into a set of primary functions to be measured,then fits the coefficients corresponding to the primary functions to reconstruct the measured wavefront.The zonal method discretizes the measured wavefront to establish a mapping relationship between the measured and differential wavefronts for reconstruction.Alternatively,the wavefront can be reconstructed by direct integration in the shearing direction.However,the modal method always uses finite terms to fit the measured wavefront,which directly ignores high-frequency information,reducing the estimated accuracy of the quadri-wave lateral shearing interferometer.The zonal method has a high spatial resolution,but the noise error accumulates along the integrated path during the reconstruction process,forming noise lines,thus,affecting the accuracy of the reconstructed wavefront.To solve this problem,a quadri-wave lateral shearing interferometric wavefront reconstruction method is proposed based on path guidance,which has both high accuracy and spatial resolution.Methods In this study,a theoretical analysis of the drawbacks of noise error accumulation in wavefront reconstruction using the zonal method without integral-path guidance under noisy environments is carried out.An integral-path evaluation-map model is established based on the deviation of differential phase derivatives,and a flowchart of the wavefront reconstruction algorithm is provided based on integral-path guidance.The proposed method consists of two steps.First,the evaluation model of the differentialphase-derivative deviation is used to count the variational characteristics of the differential phase,identify the noise error,and generate an integral path to avoid noise error.Second,the generated path is used to guide the wavefront reconstruction integr

关 键 词：测量 波前重构 路径导引 四波横向剪切干涉 差分相位 

分 类 号：O436[机械工程—光学工程]