热光效应对绝缘层上的硅微腔光梳产生和演化的影响分析  

Influence Analysis of Thermo-Optic Effect on Generation and Evolution of Silicon-on-Insulator Microcavity Optical Comb

作　　者：熊科宇 文进 何晨瑶 梁伯植 孙伟 张辉 王倩 武政委 于慧敏 Xiong Keyu;Wen Jin;He Chenyao;Liang Bozhi;Sun Wei;Zhang Hui;Wang Qian;Wu Zhengwei;Yu Huimin(School of Science,Xi’an Shiyou University,Xi’an 710065,Shaanxi,China)

机构地区：[1]西安石油大学理学院,陕西西安710065

出　　处：《激光与光电子学进展》2023年第17期316-324,共9页Laser & Optoelectronics Progress

基　　金：国家自然科学基金(61505160);陕西省创新能力支持项目(2018KJXX-042);陕西省自然科学基础研究项目(2019JM-084);陕西省科学基金(2018KJ-042);瞬态光学与光子学国家重点实验室项目(SKLST202108);石油大学研究生创新与实践能力培养项目(YCS20211077)。

摘　　要：微腔光频梳具有功耗低、可集成、梳齿间隔可调的特点,在各个领域都有广泛的应用。绝缘层上的硅(SOI)材料加工工艺与现有的互补金属氧化物半导体(CMOS)工艺兼容,使其成为最具前景的光子平台之一。本文设计了一种截面为脊形的硅基微环谐振腔,研究了各个几何参数对微环谐振腔色散的影响;数值求解了微环谐振腔热动态方程,并分析了不同参数对微环谐振腔热动态效应的影响。数值求解了LLE(Lugiato-Lefever Equation)模型,由于SOI微腔光频梳理论研究大多忽略了热光效应,因此本文分析了在模型中引入热光效应项后对光频梳产生和演化的影响。数值结果表明,在温度变化范围为0~0.16℃条件下,时域上光场最大功率值增加了22%,频域上光频梳展宽了221 nm。最后对两种热光效应条件下光频梳输出频谱进行分析,结果表明,光频梳在热光效应温度变化范围为0~0.32℃的情况下,相较于0~0.16℃的情况,带宽展宽了353 nm。Microcavity optical frequency combs exhibit low power consumption,integration,and tunable comb spacing,and they have been widely used in many fields.The technology for processing silicon-on-insulator(SOI)materials is compatible with the existing complementary metal-oxide-semiconductor(CMOS)process,making it one of the most promising photonic platforms.In this study,a silicon-based micro-ring resonator with a ridge section was designed,and the effects of various geometric parameters on the dispersion of the micro-ring resonator were investigated.The thermal dynamic equation of the micro-ring resonator was numerically solved,and the effects of different parameters on the thermal dynamic influence of the micro-ring resonator were analyzed.The Lugiato-Lefever equation(LLE)model was solved numerically.Because the thermo-optic effect was ignored in the theoretical research on SOI microcavity optical frequency comb,the influence of the thermo-optic effect on the generation and evolution of the optical frequency comb was analyzed.The numerical results show that at 0‒0.16°C,the maximum power of the light field increases by 22%in the time domain,and the optical frequency comb broadens by 221 nm in the frequency domain.Finally,the output spectrum of the optical frequency comb under two kinds of thermo-optic effects was analyzed.The results show that the bandwidth of the optical frequency comb is expanded by 353 nm compared with that at 0‒0.16℃when the temperature range of the thermo-optic effect is 0‒0.32°C.

关 键 词：非线性光学 硅基波导 微环谐振腔 Lugiato-Lefever方程模型 热光效应 光频梳 

分 类 号：O437[机械工程—光学工程]