基于纳米胺结构保护层的多波段高反射Ag基膜系制备  

Preparation of Multi-Band High Reflectivity Ag-Based Films Based on Nanolaminate Protection Layers

作　　者：苏志 何文彦[2] 魏铭[2] 王长军[2] SU Zhi;HE Wenyan;WEI Ming;WANG Changjun(School of Optoelectronics,University of Chinese Academy of Sciences,Beijing 100049,CHN;Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu 610209,CHN)

机构地区：[1]中国科学院大学光电学院,北京100049 [2]中国科学院光电技术研究所,成都610209

出　　处：《半导体光电》2023年第4期580-585,共6页Semiconductor Optoelectronics

基　　金：国家重点研发计划项目(2019YFA0708903);国家自然科学青年基金项目(62005290)。

摘　　要：Ag基膜系具有在可见到近红外波段最高的反射率,但Ag的环境稳定性较差,易受腐蚀而导致反射率降低。采用离子束辅助电子束蒸发沉积(IAD)方式制备了不同厚度比例的Ta_(2)O_(5)-SiO_(2)纳米胺薄膜,计算出有效折射率和膜层残余应力,选用Ta_(2)O_(5)厚度占比为75%的纳米胺薄膜,进一步设计制备了纳米胺结构保护层Ag基膜系和常规两层式结构保护层Ag基膜系,实现了多波段高反射率目标,并且两种Ag基膜系的残余应力相近。在24 h湿热实验后,纳米胺结构保护层Ag基膜系的反射率红移量小于常规两层式结构保护层Ag基膜系;在144 h湿热实验后,纳米胺结构保护层Ag基膜系表面缺陷腐蚀程度小于常规两层式结构保护层Ag基膜系,结合聚焦离子束制样后利用TEM观察结果,表明纳米胺结构保护层具有更高的致密度,能够为Ag基膜系提供更优良的环境稳定性。The Ag-based films have highest reflectivity from VIS to IR.However,the environmental stability of Ag thin films is poor and susceptible to corrosion with reflectivity reduction.Different thickness ratio of Ta_(2)O_(5)-SiO_(2) nanolaminate films were prepared by ion beam assisted electron beam evaporation(IAD).The effective refractive index and residual stress of the films were calculated.Furthermore,the nanoaminate film with Ta_(2)O_(5) thickness percentage of 75%was selected,and the nano-amine structured protective layer Ag-based film system and the conventional two-layer structured protective layer Ag-based film system were further designed and prepared.Multi-band high reflectivity targets were achieved and the residual stress of the two Ag-based films were similar.After 24 hours of humidity test,the reflectance redshift of nanolaminate protection Ag-based films is less than conventional two-layers type protection Ag-based films.After 144 hours of humidity test,the degree of corrosion of the surface defects of nanolaminate protection Ag-based films is less than that of the conventional two-layers type protection Ag-based films.Combined with TEM observation results after combining FIB sample preparation,it is shown that the nanolaminate protection layers possess higher density and can provide better environmental stability for Ag-based films systems.

关 键 词：Ag基膜系 纳米胺 反射率 残余应力 环境稳定性 

分 类 号：O484.1[理学—固体物理]