Mini/Micro LED巨量转移关键技术与装备研究现状  

Research Status of Key Technologies and Equipment for Mini/Micro LED Mass Transfer

作　　者：汤晖[1] 廖智燊 魏玉章 林志杭 董志强 张晓辉 TANG Hui;LIAO Zhishen;WEI Yuzhang;LIN Zhihang;DONG Zhiqiang;ZHANG Xiaohui(School of Mechanical and Electrical Engineering,Guangdong University of Technology Guangzhou,510006,China;Guangzhou Nadon Semiconductor Equipment Co.,Ltd.Guangzhou,510006,China;School of Materials Science and Engineering,South China University of Technology Guangzhou,510006,China;Jihua Laboratory Foshan,528255,China)

机构地区：[1]广东工业大学机电工程学院,广州510006 [2]广州纳动半导体设备有限公司,广州510006 [3]华南理工大学材料科学与工程学院,广州510006 [4]季华实验室,佛山528255

出　　处：《振动．测试与诊断》2023年第5期839-849,1033,共12页Journal of Vibration,Measurement & Diagnosis

基　　金：国家自然科学基金面上资助项目(51975132);广东省国际科技合作资助项目(2022A0505050078);国家自然科学基金委员会-区域创新发展联合基金重大集成资助项目(U20A6004)。

摘　　要：微型半导体发光二极管显示技术(mini/micro light emitting diode,简称Mini/Micro LED)是一种基于微型LED芯片的自发光显示技术,相较于液晶显示技术(liquid crystal display,简称LCD)和有机发光二极管显示技术(organic light‑emitting diode,简称OLED),具有显著性能优势,被视为次世代显示技术的发展趋势。由于巨量转移技术与装备的限制,Mini/Micro LED显示设备尚未实现大规模量产。针对此问题,首先,根据现有Mini/Micro LED巨量转移工艺方法的不同工作原理,总结了3种主要工艺方法,即接触式微转印技术、非接触式激光转移技术和自组装转移技术;其次,调研了现有Mini/Micro LED巨量转移工艺方法中涉及到的技术与装备,归纳了其中的通用关键技术,即高速高精对位和视觉检测;然后,针对上述关键技术挑战,围绕Mini/Micro LED新型显示装备若干关键技术与典型设备集成开发介绍了笔者的前期研究工作;最后,讨论了实现Mini/Micro LED大规模量产中存在的问题及发展方向。Mini/micro light emitting diode display technology(Mini/Micro LED)is a self-luminous display technology based on micro LED chips.Compared with liquid crystal display technology(LCD)and organic light emitting diode display technology(OLED),it has significant performance advantages and is regarded as the development trend of next-generation display technology.However,due to limitations in mass transfer technology and equipment,Mini/Micro LED display equipment has not yet achieved large-scale mass production.To address this issue,firstly three main process methods are summarized based on the different working principles of existing Mini/Micro LED mass transfer process methods,namely contact micro-transfer technology,non-contact laser transfer technology and self-assembly transfer technology.Secondly,the technology and equipment involved in the existing Mini/Micro LED mass transfer process methods are investigated,and the common key technologies are summarized,namely high-speed and high-precision alignment and visual inspection.Then,in response to the above key technical challenges,the authors conduct systematic and in-depth research on the integrated development of several key technologies and typical equipment in the new Mini/Micro LED display field.Finally,the existing problems and development directions in achieving large-scale mass production of Mini/Micro LED are discussed.

关 键 词：微型半导体发光二极管显示技术 巨量转移 显示半导体装备 高速高精对位 振动抑制 

分 类 号：TH69[机械工程—机械制造及自动化]