基于激光诱导石墨烯的柔性超疏水温度传感器研究  

Research on Flexible and Superhydrophobic Temperature Sensor Based on Laser-Induced Graphene

作　　者：杨丽[1,2,3,4] 陈雪 王子涵[2,6] 高鹏 徐桂芝[2,3,5] Yang Li;Chen Xue;Wang Zihan;Gao Peng;Xu Guizhi(Department of Health Sciences and Biomedical Engineering Hebei University of Technology Tianjin 300130,China;State Key Laboratory of Reliability and Intelligence of Electrical Equipment Hebei University of Technology Tianjin 300130,China;Hebei Key Laboratory of Bioelectromagnetics and Neuroengineering Hebei University of Technology Tianjin 300130,China;Tianzhong Yimai Technology Development Co.Ltd Tianjin 300392,China;Department of Electrical Engineering Hebei University of Technology Tianjin 300130,China;Department of Mechanical Engineering Hebei University of Technology Tianjin 300130,China;Department of Electronic Information Hebei University of Technology Tianjin 300130,China)

机构地区：[1]河北工业大学生命科学与健康工程学院,天津300130 [2]省部共建电工装备可靠性与智能化国家重点实验室(河北工业大学),天津300130 [3]河北工业大学河北省生物电磁与神经工程重点实验室,天津300130 [4]天津市天中依脉科技开发有限公司,天津300392 [5]河北工业大学电气工程学院,天津300130 [6]河北工业大学机械工程学院,天津300130 [7]河北工业大学电子信息学院,天津300130

出　　处：《电工技术学报》2023年第S01期257-266,共10页Transactions of China Electrotechnical Society

基　　金：河北省重点研发计划(20271701D);中国博士后科学基金(2022M722378)资助项目。

摘　　要：体温是人体健康状况的重要指标,柔性温度传感器可以实现长期、远程、实时的体温监测,对于老龄化人口家庭床边监测与疾病早期预警具有重要意义。该文提出一种在聚酰亚胺(PI)薄膜上通过激光直写一步制备三维多孔石墨烯,并同步实现图案化柔性温度传感器的高精度组装方法。该传感器基于蛇形几何结构设计,可以有效抑制弯曲形变的干扰,与人体皮肤共形贴附;疏水二氧化硅封装层的引入能够有效隔绝环境高湿度的影响,并且没有牺牲温度传感性能。该温度传感器具有高灵敏度(TCR=-6.534×10^(-4)/℃)、0.99184的拟合优度、宽检测范围(25~75℃)、高分辨率(0.1℃)和良好的稳定性。采用粘合剂可以与日常生活用品(例如口罩和创可贴)便携集成,实现呼吸频率、体温的实时监测,并通过关节部位体温检测,实现骨关节炎的早期预警,在健康管理与疾病预警方面具有重要应用潜力。Body temperature is a crucial indicator of human health,and flexible temperature sensors can achieve long-term,remote,and real-time temperature monitoring,which is of great significance for bedside monitoring and early warning of diseases in elderly households.However,the development of most temperature monitoring devices is limited by their high rigidity,large volume,cumbersome preparation process,uncomfortable wearing,and low linearity.To address these issues,this paper proposes a high-precision assembly method for a flexible and superhydrophobic temperature sensor based on patterned laser-induced graphene(LIG).The temperature sensor can be portable integrated into masks and band-aids to achieve the monitoring of breathing frequency and skin temperature in various parts of the body.Firstly,the sensor is designed as a curved snake-shaped structure to ensure a large area of sensing in relative space,while also providing good resistance to bending deformation.It can be conformal attached to the human skin,allowing the sensor to adjust to the body's dynamic curve changes.Secondly,a facile and scalable laser direct writing process is used to prepare a 3D porous graphene foam from the carbon-containing polyimide(PI)film,and the high-performance flexible temperature sensor is obtained through the adjustment of the laser parameter.Finally,immersing the sensor into hydrophobic silica(Hf-SiO_(2))suspension and dried to obtain a flexible and superhydrophobic temperature sensor with moisture resistance.The one-step prepared temperature sensor is small and light(30 mm×5.5 mm×0.06 mm),which guarantees wearable comfort.The micro-appearance characteristics of the LIG flexible temperature sensor show a large number of three-dimensional stacking discharge micron/nano-porous structures,which are the result of numerous gas products released during the process of laser rapid light and thermal effects.The performance test results show that the temperature sensor has good stability,repetitiveness,and linearity within a detection ra

关 键 词：激光诱导石墨烯 柔性温度传感器 蛇形结构设计 超疏水 体温监测 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TQ127.11[自动化与计算机技术—控制科学与工程]