基于空间光耦合系统的芯片温度传感器  

The chip of temperature sensor based on spatial optical coupling system

作　　者：章喆 李明宇 肖泽华 潘伦 包晟 杨志平 李秋顺 ZHANG Zhe;LI Mingyu;XIAO Zehua;PAN Lun;BAO Sheng;YANG Zhiping;LI Qiushun(College of Optoelectronic Engineering,Changchun University of Science and Technology,Changchun 130022,China;Zhejiang LightTip Electronic Technology Co.,LTD.,Wenzhou 325011,China;State Key Laboratory of Modern Optical Instrumentation,Zhejiang University,Hangzhou,310027,China;Biology Institute,Qilu University of Technology(Shandong Academy of Sciences),Jinan 250103,China)

机构地区：[1]长春理工大学光电工程学院,吉林长春130022 [2]浙江光尖电子技术有限公司,浙江温州325011 [3]浙江大学现代光学仪器国家重点实验室,浙江杭州310027 [4]齐鲁工业大学(山东省科学院)山东省科学院生物研究所,山东济南250103

出　　处：《光学仪器》2023年第5期79-86,共8页Optical Instruments

基　　金：国家自然科学基金项目(62027825);国家重点研发计划项目(2020YFC2004600);吉林省自然科学基金(20220101130JC);山东省自然科学基金(ZR2019MC069);高等学校学科创新引智计划(111计划D21009)。

摘　　要：研究了一种硅光子芯片空间光耦合系统,简化了集成光子芯片用光纤阵列耦合的方式,通过将1550 nm附近波段的光通过空间光学系统,经光栅耦合器垂直耦合进入集成光子芯片,经过波导与微环谐振腔实现光学传感,采用多模光纤收集出射能量,并进行温度传感测试。实验结果表明,用波长探测方式,得到自由光谱范围(FSR)为0.85 nm,Q值为16321的环形谐振腔直通端透射谱线。在温度传感测试中,其灵敏度达到127 pm/℃。通过进一步对比测试表明,空间光耦合与光纤阵列光耦合只在插入损耗方面有所差距,耦合系统可得到较好的温度传感测试结果。空间光耦合具有更换传感器芯片便捷,容易实现多通道测试等优点。A silicon photonic chip space coupling system is studied,which simplifies the coupling mode of integrated photonic chip with optical fiber array,Through the spatial optical system,the light in the band near 1550 nm is vertically coupled into the integrated photonic chip through the grating coupler,and the optical sensing is realized through the waveguide and microring resonator.The multi-mode optical fiber is used to collect the emerging energy and carry out the temperature sensing test.The experimental results show that the transmission lines of the through-end ring resonator with frree spectral range(FSR)of 0.85 nm and Q value of 16321 are obtained by wavelength detection.In temperature sensing tests,the sensitivity reached 127 pm/℃.The results show that there is only a difference between spatial optical coupling and optical fiber array optical coupling in insertion loss,and the coupling system can get better temperature sensing test results.Spatial optical coupling has the advantages of convenient replacement of sensor chip and easy to multi-channel testing.

关 键 词：集成光子芯片 光耦合系统 光栅耦合器 光谱扫描 温度传感 

分 类 号：TH477[机械工程—机械制造及自动化]