基于F-P微小角度测量原理的装置设计与实验研究  

Design of a micro-angle measurement device based on F-P etalon

作　　者：吴晨光 沈小燕 WU Chenguang;SHEN Xiaoyan(College of Metrology and Measurement Engineering,China Jiliang University,Hangzhou 310018,China)

机构地区：[1]中国计量大学计量测试工程学院,浙江杭州310018

出　　处：《中国计量大学学报》2023年第3期342-347,共6页Journal of China University of Metrology

基　　金：国家自然科学基金项目(No.51875543)。

摘　　要：目的:设计一套微小角度测量装置并对其展开实验研究。方法:基于F-P标准具微小角度测量模型,对微小角度测量装置进行机械结构设计与实验研究。结果:所设计的微小角度测量装置与ELCOMAT 3000自准直仪在±150″测量范围内,角度测量不确定度不大于0.050″,两者示值误差不大于0.58″。结论:微小角度测量装置与ELCOMAT 3000自准直仪对比实验结果证明,微小角度测量值准确可靠。微小角度测量装置整体结构设计简单且操作简便。Aims:A micro-angle measurement device was designed and experimentally studied.Methods:Based on the micro-angle measurement model of F-P multi-beam interference imaging,the micro-angle measurement device was designed and experimentally studied.Results:The designed micro-angle measuring device and the ELCOMAT 3000 autocollimator were in the measurement range of±150″.The angle measurement uncertainty was not more than 0.50″;and the indication error was not more than 0.58″.Conclusions:Compared with the autocollimator,the micro-angle measurement device is more accurate and reliable;and the overall structure is simple and easy to operate.

关 键 词：F-P标准具 微小角度测量 装置设计 不确定度 

分 类 号：TB922[一般工业技术—计量学]