高纯及超高纯四氯化钛制备技术研究进展  

Research progress of preparation technology of high purity and super high purity titanium tetrachloride

作　　者：张兴毅 赵雄 万烨[1,2,3] 郭树虎 袁振军[1,2] 刘见华 ZHANG Xing-yi;ZHAO Xiong;WAN Ye;GUO Shu-hu;YUAN Zhen-jun;LIU Jian-hua(National Engineering Laboratory of Polycrystalline Silicon Preparation Technology,Luoyang 471023,China;China Silicon Corporation Company Limited,Luoyang 471023,China;China ENFI Engineering Corporation,Beijing 100038,China)

机构地区：[1]多晶硅制备技术国家工程实验室,河南洛阳471023 [2]洛阳中硅高科技有限公司,河南洛阳471023 [3]中国恩菲工程技术有限公司,北京100038

出　　处：《应用化工》2021年第S01期244-247,266,共5页Applied Chemical Industry

基　　金：工业和信息化部工业强基工程项目(0714-EMTC02-5593/13);郑洛新国家自主创新示范区创新引领型产业集群专项(18100212700)。

摘　　要：四氯化钛是钛及其化合物生产中的重要中间产品,钛工业的重要原料,有着极其广泛的应用。综述了通过除钒、蒸馏、精馏、多级精馏等方法以及这些方法的组合来制备高纯四氯化钛;阐述了在高纯四氯化钛的基础上,通过吸附、汽提、蒸馏、亚沸蒸馏、多级精馏等方法以及此类方法的组合,来制备可应用于半导体行业的超高纯四氯化钛。对超高纯四氯化钛的制备工艺进行探讨,并展望超高纯四氯化钛制备工艺的发展趋势和方向。Titanium tetrachloride is an important intermediate product in the production of titanium and its compounds.The preparation of high purity titanium tetrachloride by vanadium removal,distillation,rectification,multistage distillation and their combination is reviewed.Based on high purity titanium tetrachloride,the super high purity Titanium tetrachloride which can be used in semiconductor industry is prepared by adsorption,stripping,distillation,subboiling distillation,multistage distillation and their combination.The preparation technology of super-high purity titanium tetrachloride was discussed,and the development trend and direction of superhigh purity Titanium tetrachloride were prospected.

关 键 词：四氯化钛 除钒 蒸馏 复合提纯 

分 类 号：TQ134.11[化学工程—无机化工]