Rapid prototyping of a polymer MEMS dropletdispenser by laser-assisted 3D printing  

作　　者：Rémi Courson Oleksii Bratash Ali Maziz CloéDesmet Ricardo Alvarado Meza Loïc Leroy Elodie Engel Arnaud Buhot Laurent Malaquin Thierry Leïchlé 

机构地区：[1]LAAS-CNRS,Universitéde Toulouse,CNRS,31400 Toulouse,France [2]UniversitéGrenoble Alpes,CNRS,CEA,IRIG,SyMMES,38000 Grenoble,France [3]Georgia Tech−CNRS International Research Laboratory,Atlanta,GA 30332,USA

出　　处：《Microsystems & Nanoengineering》2023年第4期211-221,共11页微系统与纳米工程（英文）

基　　金：This work was supported by the French National Research Agency(ANR)under the research project MOLY(grant ANR-15-CE19–0005)and CBH-EUR-GS(ANR-17-EURE-0003);by the European Union’s Horizon 2020 research and innovation program as part of the HoliFAB project(grant agreement no.760927);by FEDER European Regional Funds and French Région Occitanie as part of the MultiFAB project(grant agreement number 16007407/MP00115MP0011594);by the Labex ARCANE,and by the French national technological network RENATECH.

摘　　要：In this work, we introduce a polymer version of a previously developed silicon MEMS drop deposition tool for surfacefunctionalization that consists of a microcantilever integrating an open fluidic channel and a reservoir. The device isfabricated by laser stereolithography, which offers the advantages of low-cost and fast prototyping. Additionally,thanks to the ability to process multiple materials, a magnetic base is incorporated into the cantilever for convenienthandling and attachment to the holder of a robotized stage used for spotting. Droplets with diameters ranging from∼50 μm to ∼300 μm are printed upon direct contact of the cantilever tip with the surface to pattern. Liquid loading isachieved by fully immersing the cantilever into a reservoir drop, where a single load results in the deposition of morethan 200 droplets. The influences of the size and shape of the cantilever tip and the reservoir on the printing outcomeare studied. As a proof-of-concept of the biofunctionalization capability of this 3D printed droplet dispenser,microarrays of oligonucleotides and antibodies displaying high specificity and no cross-contamination are fabricated,and droplets are deposited at the tip of an optical fiber bundle.

关 键 词：CANTILEVER RESERVOIR PRINTING 

分 类 号：TB383[一般工业技术—材料科学与工程]