复杂应力条件下MEMS加速度传感器可靠性分析  

Reliability analysis of MEMS acceleration sensors under complex stress conditions

作　　者：关存贺 许高斌 王焕章 张宇 马渊明 Guan Cunhe;Xu Gaobin;Wang Huanzhang;Zhang Yu;Ma Yuanming(School of Microelectronics,Hefei University of Technology,Hefei 230009,China;Micro Electromechanical System Research Center of Engineering and Technology of Anhui Province,Hefei 230009,China)

机构地区：[1]合肥工业大学微电子学院,合肥230009 [2]安徽省MEMS工程技术研究中心,合肥230009

出　　处：《电子测量与仪器学报》2023年第7期17-25,共9页Journal of Electronic Measurement and Instrumentation

基　　金：国家重点研发计划(2020YFB2008901);安徽省发改委研发创新(JZ2021AFKJ0050)项目资助。

摘　　要：针对MEMS加速度传感器在复杂应力条件下潜在的疲劳失效与断裂失效问题,提出了一种基于全概率公式的可靠性评估模型,完成了器件在振动环境、冲击环境以及振动-冲击耦合环境下的可靠性建模。模型包含Wiener过程和齐次泊松随机过程,分别描述器件在振动环境中的疲劳损伤以及器件遭受的随机冲击,进一步考虑了随机冲击的幅值大小对器件退化率的影响。通过器件在冲击应力下产生的疲劳损伤突增量,反映多失效模式间的相关性。对比分析了振动-冲击相互独立与相互耦合作用的可靠性模型,结果表明,振动-冲击相互耦合作用的可靠性模型评估结果更具有指导意义。A reliability assessment model based on the total probability formula is proposed to address the potential fatigue failure and fracture failure of MEMS acceleration sensors under complex stress conditions.The model accomplishes reliability modeling of the device in vibration,impact,and vibration-impact coupled environments.The model includes the Wiener processes and the homogeneous poisson random processes,which describe the fatigue damage of the device in the vibration environment and the random impact of the device,respectively.Furthermore,the influence of the amplitude of random impacts on the device degradation rate is considered.The correlation between multiple failure modes is reflected by the sudden increase in fatigue damage generated by the device under impact stress.A comparative analysis was conducted to compare the reliability models considering the independent and coupled effects of vibration and impact.The results demonstrate that the reliability model considering the coupled effects of vibration and impact provides more meaningful guidance in the evaluation.

关 键 词：MEMS加速度传感器 多环境应力 可靠性 全概率公式 

分 类 号：TN406[电子电信—微电子学与固体电子学]