化学气相沉积法合成Si_(3)N_(4)纳米带的研究  

Synthesis of Si_(3)N_(4)Nanobelts via Chemical Vapor Deposition

作　　者：李思婷 李增祎 傅煜然 刘丽[1] 谭嘉林 赵文科 谭浩博 陈洋 Li Siting;Li Zengyi;Fu Yuran;Liu Li;Tan Jialin;Zhao Wenke;Tan Haobo;Chen Yang(School of Materials Science and Engineering,Hunan Institute of Technology,Hengyang,Hunan 421002)

机构地区：[1]湖南工学院材料科学与工程学院,湖南衡阳421002

出　　处：《非金属矿》2023年第5期1-3,共3页Non-Metallic Mines

基　　金：湖南省教育厅科学研究优秀青年项目(22B0856);湖南省应用特色学科材料科学与工程学科(湘教通[2022]351号);湖南工学院大学生创新创业训练计划项目(S202311528055,CY2023168);湖南工学院创新训练中心入驻项目(2022EP19C)。

摘　　要：以Si粉、酚醛树脂和硝酸铁为原料,采用化学气相沉积法在氮气气氛下合成Si_(3)N_(4)纳米带。研究了热处理温度和硝酸铁添加量对合成Si_(3)N_(4)纯度和形貌的影响。结果表明,在非催化作用下,热处理温度升高有利于提高Si_(3)N_(4)纯度;温度为1500℃时,合成高纯Si_(3)N_(4),其中α-Si_(3)N_(4)和β-Si_(3)N_(4)生成量分别为91%和9%。添加催化剂显著影响Si_(3)N_(4)形貌,其形貌由直线形带状结构演变为蜷曲的带状结构,具有这种带状结构的Si_(3)N_(4)为α-Si_(3)N_(4);当硝酸铁添加量为5%时,α-Si_(3)N_(4)生成量较高,为95%。Si powder,phenolic resin and ferric nitrate were used as raw materials to synthesize Si_(3)N_(4)nanobelts under nitrogen atmosphere via a chemical vapor deposition method.The effects of treatment temperature and ferric nitrate content on the purity and morphology of synthesized Si_(3)N_(4)were studied.Under non-catalytic action,the increase of heat treatment temperature was beneficial to improve the purity of Si_(3)N_(4);At 1500℃,high purity Si_(3)N_(4)was synthesized,in whichα-Si_(3)N_(4)andβ-Si_(3)N_(4)were 91%and 9%,respectively.The morphology of Si_(3)N_(4)was significantly affected by the addition of catalyst,its morphology evolved from a straight band structure to a curled band structure,and the band structure of Si_(3)N_(4)wasα-Si_(3)N_(4);When the addition of iron nitrate was 5%,the yield ofα-Si_(3)N_(4)was higher,which was 95%.

关 键 词：Si_(3)N_(4)纳米带 催化 化学气相沉积法 显微结构 

分 类 号：TB34[一般工业技术—材料科学与工程]