ITO纳米晶-植物纤维复合材料的电阻式压力传感器  

The piezoresistive pressure sensors based on ITO nanocrystalline-plant fiber composite

作　　者：夏亿劼 黄鹏举 林心铭 吴鲁超 李珂 高晨溟 钟高余 Yijie Xia;Pengju Huang;Xinming Lin;Luchao Wu;Ke Li;Chenming Gao;Gaoyu Zhong(School of Mechanical Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China;Department of Materials Science,Fudan University,Shanghai 200433,China)

机构地区：[1]School of Mechanical Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China [2]Department of Materials Science,Fudan University,Shanghai 200433,China

出　　处：《Science China Materials》2023年第10期3922-3930,共9页中国科学（材料科学（英文版）

基　　金：financially supported by the National Natural Science Foundation of China(11874267 and 51373036);the National Science Foundation for Young Scientists of China(61704107)。

摘　　要：可穿戴电子设备因其在机器人触觉、人机交互和脉搏测试等领域具有潜在应用而引起广泛关注.作为一种可穿戴电子设备,柔性压力传感器应该是环保的,而且制造成本低.基于纤维素纸的压力传感器由于其优良的特性,如轻质、无毒或低毒、可降解性和柔韧性,而引起了人们的关注.在此,我们报道了一种基于铟锡氧化物(ITO)纳米晶体和植物纤维复合材料的电阻式触觉传感器.该压力传感器具有宽的检测范围(0-100 kPa)、高灵敏度(464.88 kPa^(-1))、快速的响应时间(6.93 ms)和恢复时间(7.18 ms)以及良好的加载/卸载稳定性.我们还展示了该压力传感器用于脉搏测试、呼吸监测、语音识别等各种人体运动检测.结果表明,ITO纳米晶-植物纤维复合材料压力传感器在智能可穿戴电子产品中显示出巨大应用潜力.Wearable electronic devices have attracted extensive attention for their potential applications in robotic haptics,human-computer interaction,and human pulse wave measurement.A flexible pressure sensor,as a wearable electronic device,should be environmentally friendly and low-cost to manufacture.Cellulose paper-based pressure sensors have attracted much attention due to their excellent properties such as light weight,no or low toxicity,degradability,and flexibility.Here,we report a strategy for piezoresistive tactile sensors based on indium tin oxide(ITO)nanocrystal and plant fiber composite.The pressure sensor has a wide detection range(0-100 kPa),high sensitivity(464.88 kPa^(-1)),fast response time(6.93 ms)and recovery time(7.18 ms),and good loading and unloading stability.We also demonstrate that the as-prepared pressure sensors can be used for pulse testing,respiration monitoring,voice recognition,and various human motion detections.The results show that the pressure sensor based on the ITO nanocrystalline-plant fiber composite has the prospect of being applied to smart wearable electronic products.

关 键 词：pressure sensors PIEZORESISTANCE NANOCRYSTALLINE COMPOSITE 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TB332[自动化与计算机技术—控制科学与工程]