用于耳内体温监测的柔性温度传感器  

Flexible Temperature Sensor for In-Ear Body Temperature Monitoring

作　　者：项晓禹 孙鹏[1] 刘伟涛 李浩然 张弛 刘军山[1] Xiang Xiaoyu;Sun Peng;Liu Weitao;Li Haoran;Zhang Chi;Liu Junshan(Key Laboratory for Micro/Nano Technology and System of Liaoning Province,School of Mechanical Engineering,Dalian University of Technology,Dalian 116024,China)

机构地区：[1]大连理工大学机械工程学院辽宁省微纳米技术及系统重点实验室,辽宁大连116024

出　　处：《微纳电子技术》2023年第9期1429-1435,共7页Micronanoelectronic Technology

基　　金：国家重点研发计划项目(2020YFB2008502);国家自然科学基金(51875083)。

摘　　要：为了在使用入耳式耳机进行日常活动时,可以通过监测耳内温度来评估健康状况,研制了一种柔性铂薄膜温度传感器。传感器的感温单元设计为蛇形结构,可以共形贴附于曲面。制备过程中,采用磁控溅射技术在已图形化的柔性基板表面沉积铂,省去光刻、显影等工艺,直接完成对铂薄膜的图形化。在25~45℃的温度范围内,传感器的电阻温度系数为0.0028/℃,分辨率为0.1℃,能够满足体温测量对传感器性能的要求。将传感器集成至耳机耳塞上,并通过标定实验得到电阻-温度关系公式。研发了基于传感器的无线入耳式体温监测系统,结合手机应用程序(APP)进行实际体温测量。在36.3~36.7℃的温度范围内,对同一位使用者测温的平均误差为±0.058℃,表明该传感器能够准确获取耳内体温。A flexible platinum film temperature sensor was developed to access the health status by monitoring temperature in the ear while using an in-ear headphone for daily activities.The temperature sensing unit of the sensor was designed as a serpentine structure,which could be attached to the curved surface conformally.During the fabrication process,magnetron sputtering method was used to deposit platinum on the surface of a patterned flexible substrate,where the platinum film was directly patterned without lithography,development and other processes.In the temperature range of 25 to 45℃,the temperature coefficient of resistance of the sensor is 0.0028/℃,and the resolution is 0.1℃,which can meet the performance requirements of the sensor for body temperature measurement.The sensor was integrated into the earbud and the resistance-temperature relationship equation was obtained through calibration experiments.A wireless in-ear body temperature monitoring system based on the sensor was developed and actual body temperature could be measured combined with a smart phone application(APP).The average error of the actual body temperature measurement is±0.058℃for the same user in the temperature range of 36.3 to 36.7℃,indicating that the sensor can obtain the temperature in the ear accurately.

关 键 词：温度传感器 柔性传感器 微机电系统(MEMS)传感器 可穿戴设备 体温监测 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]