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作 者:许童杰 刘振华 蒋秀丽 刘永生 Xu Tongjie;Liu Zhenhua;Jiang Xiuli;Liu Yongsheng(College of Mathematics and Physics,Shanghai University of Electric Power,Shanghai 200090,China)
出 处:《微纳电子技术》2023年第9期1457-1463,共7页Micronanoelectronic Technology
基 金:国家自然科学基金(51971128,52171185);上海市优秀学术/技术带头人计划资助项目(20XD1401800)。
摘 要:采用不同内外径的304不锈钢管封装制作了I型光纤光栅温度传感器,温度灵敏度均达到20 pm/℃以上,是裸光纤光栅温度传感器的2倍以上,线性度优异,能够达到0.99957以上。内外径为0.4、0.5 mm,0.75、1 mm,2、3 mm的不锈钢管封装的传感器的响应时间分别为21.2、32.3、104.3 s,响应时间随着不锈钢管的增厚而增加。薄壁管(内外径为0.4、0.5 mm)封装的光纤光栅温度传感器虽然响应时间短,但在温差为75℃的环境下波长存在异常下降的现象,这在一些应用场景中十分不利。利用ANSYS有限元仿真软件对不同内外径不锈钢管封装的光纤光栅温度传感器进行模拟,仿真得到响应时间与z轴形变量。仿真值与实验值进行比较可知,其误差较小,并且z轴形变量的变化也能较好地解释波长异常变化的原因。Type I fiber grating temperature sensors were fabricated by packaging in 304 stainless steel tubes with different inner and outer diameters.The temperature sensitivity of the sensors is above 20 pm/℃,which is more than twice that of the bare fiber grating temperature sensors.The linearity is excellent,achieving 0.99957 or higher.The response time of sensors packaged in stainless steel tubes with inner and outer diameters of 0.4 and 0.5 mm,0.75 and 1 mm,2 and 3 mm are 21.2,32.3 and 104.3 s,respectively,showing that the response time increases with the increase of the thickness of the stainless steel tube.Although the response time of the fiber grating temperature sensors packaged with thin-walled tubes(inner and outer diameters of 0.4 and 0.5 mm)is short,the wavelength of the fiber grating temperature sensor is abnormally decreased under the environment of a temperature difference of 75℃,which is very unfavorable in some application scenarios.The fiber grating temperature sensors packaged in stainless steel tubes with different inner and outer diameters were simulated by using ANSYS finite element simulation software,and the response time and z-axis strain were obtained by simulation.The comparison between the simulation value and the experimental value shows that the error is small,and the change of z-axis strain can explain the cause of the abnormal change of wavelength well.
关 键 词:温度传感器 光纤光栅 304不锈钢管 有限元仿真 响应时间 灵敏度
分 类 号:TP212[自动化与计算机技术—检测技术与自动化装置]
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