基于桥臂电阻补偿的宽温区压力传感器优化设计  

Optimization Design of Pressure Sensor with Wide Temperature Range Based on Resistance Compensation of Bridge Arms

作　　者：涂孝军 石佑敏 范红梅 唐艳玲 李闯 Tu Xiaojun;Shi Youmin;Fan Hongmei;Tang Yanling;Li Chuang(Engineering Training Center,Soochow University,Suzhou 215131,China;Suzhou Changfeng Avionics Co.,Ltd.,Suzhou 215151,China)

机构地区：[1]苏州大学工程训练中心,江苏苏州215131 [2]苏州长风航空电子有限公司,江苏苏州215151

出　　处：《微纳电子技术》2023年第9期1473-1480,共8页Micronanoelectronic Technology

摘　　要：针对航空领域中使用温区宽、测量介质和工作环境温差大、全温区精度要求高等特殊应用要求,通过压力芯片中桥臂电阻在不同温度下的阻值变化实现介质温度测量,并将该温度作为传感器后端调理芯片补偿的温度输入,从而消除了后端调理芯片和前端微电子机械系统(MEMS)芯片之间的温度差。同时,采用国产数字调理芯片,通过多温度、多压力点校准,实现宽温区高精度压力测量。结果表明,在-55~125℃范围内,极限180℃的温度梯度条件下,测量精度达到0.42%FS。该补偿方法不仅提高了传感器全温区精度,而且简化了电路结构、提升了产品整体可靠性,具有较好的工程化应用前景。In view of the special application requirements of wide temperature range,large temperature difference between the measuring medium and working environment,and high precision of full temperature zone in the aviation field,the dielectric temperature was measured by the resistance value change of the bridge arm resistance in the pressure chip at different temperatures,and the dielectric temperature was used as the temperature input of the sensor rear conditioning chip compensation.Thus,the temperature difference between the rear conditioning chip and the front micro-electromechanical system(MEMS)chip was eliminated.Meanwhile,a domestic digital conditioning chip was adopted to realize high precision pressure measurement in a wide temperature area through multi-temperature and multi-pressure point calibration.The results show that within the range of-55℃to 125℃and under the ultimate temperature gradient condition of 180℃,the measurement precision reaches 0.42%FS.The compensation method improves the precision of the whole temperature zone of the sensor,simplifies the circuit structure and improves the overall reliability of the product,thus has a good engineering application prospect.

关 键 词：压力传感器 宽温区 高精度 桥臂电阻 温度补偿 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]