锂磷氧氮薄膜电解质的制备与结构分析  

Preparation and structural analysis of lithium phosphorus oxynitrogen thin film electrolyte

作　　者：张敏[1] 牛亚军 张浩昌 俞兆喆[1] 田冰冰 ZHANG Min;NIU Yajun;ZHANG Haochang;YU Zhaozhe;TIAN Bingbing(School of Mechanical and Electrical Engineering,Guilin University of Electronic Technology,Guilin 541004,China;International Collaborative Laboratory of 2D Materials for Optoelectronics Science and Technology of Ministry of Education,Shenzhen University,Shenzhen 518060,China)

机构地区：[1]桂林电子科技大学广西制造系统与先进制造技术重点实验室,广西桂林541004 [2]深圳大学二维材料光电科技国际合作联合实验室,广东深圳518060

出　　处：《桂林电子科技大学学报》2023年第4期313-318,共6页Journal of Guilin University of Electronic Technology

基　　金：国家自然科学基金(21805055);广西自然科学基金(2019JJA120043,2020GXNSFAA159059);大学生创新训练计划(201910595112)。

摘　　要：锂磷氧氮(LiPON)是薄膜电池应用中最具代表性的薄膜固态电解质,还被用作界面保护层,用以提高电解质与正极、负极的界面稳定性。采用射频磁控溅射方法,以Li_(3)PO_(4)为溅射靶材,在N_(2)气氛下沉积LiPON薄膜固态电解质。通过优化溅射功率、工作压强、基底温度等工艺条件,制备出表面致密、均匀、无缺陷的LiPON薄膜。XPS测试结果表明,薄膜的溅射过程是一种反应式溅射,N取代Li_(3)PO_(4)结构中的桥氧键(—O—)与非桥氧键(=O),形成氮三配位键N_(t)(—N<)和氮双配键N_(d )(=N—),构成网状结构的LiPON薄膜。测得LiPON薄膜固态电解质的室温离子电导率为7×10^(-7)S·cm^(-1),电子电导率为4.8×10^(-13 )S·cm^(-1)。LiPON薄膜固态电解质致密的形貌和稳定的电化学性能使得LiPON在薄膜电池及固态电池界面改性中的应用具有显著优势。Lithium phosphorus oxynitride(LiPON)is the most representative thin-film solid-state electrolyte for the applications of thin-film battery.It is also used as an interfacial protective layer to improve the interfacial stability of the electrolyte with the positive and negative electrodes.The radio frequency magnetron sputtering was used to deposit Li_3PO_(4as) the sputtering target,and the solid electrolyte of lithium phosphorus oxynitride(LiPON)thin film was deposited under nitrogen atmosphere.By optimizing the sputtering power,working pressure,substrate temperature and other process conditions,the LiPON thin film with dense,uniform and defect-free surfaces was prepared.The XPS indicates that the sputtering process of the thin film is a reactive sputtering process,and N replaced the bridge oxygen bond(—O—)and non-bridge oxygen bond(=O)in the Li_3PO_(4structure) to reconstitute nitrogen three-coordinate bond N_t(—N)and nitrogen double-coordinate bond N_d(=N—)to form a LiPON film with a network structure.The room temperature ionic conductivity of the LiPON thin film solid electrolyte was measured to be 7×10^(-7 )S·cm^(-1),and the electronic conductivity was 4.8×10^(-13)S·cm^(-1).The dense morphology and stable electrochemical performance of LiPON thin-film solid-state electrolytes have significant advantages for the application of LiPON in thin-film batteries and interfacial modification of solid-state batteries.

关 键 词：LIPON 薄膜固态电解质 射频磁控溅射 工艺优化 薄膜电池 

分 类 号：O754[理学—晶体学]