柔性薄膜晶体管在传感器领域的研究进展  

Research Progress of Flexible Thin Film Transistors in the Field of Sensors

作　　者：邱莹[1] 杨斌 卞曙光 Qiu Ying;Yang Bin;Bian Shuguang(Guangdong R&D Center for Technological Economy,Guangzhou 510006,China;High Technology Research and Development Center,Ministry of Science and Technology,Beijing 100044,China)

机构地区：[1]广东省技术经济研究发展中心,广州510006 [2]科学技术部高技术研究发展中心,北京100044

出　　处：《半导体技术》2023年第10期879-894,共16页Semiconductor Technology

摘　　要：当今的电子产品正面临着颠覆性的演变,从笨重刚性设备发展到轻巧、柔软和灵活的设备,甚至需要生物相容性和可生物降解等。薄膜晶体管(TFT)是构成柔性电子的最常见的有源薄膜器件之一,在可穿戴和纺织集成系统、表皮设备和机器人人造皮肤等领域具有巨大潜力。首先介绍了TFT的种类和制备方法,对比了真空法和溶液法两者的优缺点;接着从TFT各功能层出发,包括绝缘层、半导体层和电极,对比了无机金属氧化物和聚合物材料体系,并总结了柔性TFT在传感器领域的研究进展和应用;最后,提出了柔性TFT在传感器领域存在的难点和问题,对其应用进行了展望。Recent electronic products are facing a disruptive evolution,from heavy rigid devices to light,soft and flexible devices,and even need to be biocompatible and biodegradable.Thin film transistors(TFTs)are one of the most common active thin film devices that constitute flexible electronics,and have great potential in fields such as wearable and textile integrated systems,skin devices and robot artificial skin.Firstly,the types and preparation methods of TFT are introduced,while the advantages and disadvantages of vacuum method and solution method are compared.Then,starting from the functional layers of TFTs,including insulating layer,semiconductor layer and electrode,the inorganic metal oxide and polymer material systems are compared,and the research progress and application of flexible TFTs in the field of sensors are summarized.Finally,the difficulties and problems of flexible TFTs in the field of sensors are proposed,and the application is prospected.

关 键 词：柔性电子 薄膜晶体管(TFT) 传感器 绝缘层 半导体层 电极 

分 类 号：TN321.5[电子电信—物理电子学] TP212.41[自动化与计算机技术—检测技术与自动化装置]