基于LabVIEW的界面电阻自动测试装置  

Automatic Test Apparatus for Interface Resistance Based on LabVIEW

作　　者：黄西林 胡晓凯 孙得柱 Huang Xilin;Hu Xiaokai;Sun Dezhu(Guangxi Education Department Key Laboratory of Microelectronic Packaging and Assembly Technology,School of Mechanical and Electrical Engineering,Guilin University of Electronic Technology,Guilin 541004,China)

机构地区：[1]桂林电子科技大学机电工程学院,广西高校微电子封装与组装技术重点实验室,广西桂林541004

出　　处：《半导体技术》2023年第10期942-947,共6页Semiconductor Technology

基　　金：广西自然科学基金资助项目(2020GXNSFAA159107);桂林电子科技大学研究生教育创新计划项目(2023YCXS003)。

摘　　要：界面电阻是半导体器件制备和性能表征的一个重要参数。针对金属-半导体互连块体样品的界面电阻测量,利用Keithley 2450型数字源表、自制夹持力可视化夹具、运动控制卡、直线模组等搭建了基于扫描探针法的界面电阻自动测试装置,并在LabVIEW下开发了测试软件。改变了传统扫描探针法的驱动方式,即使用直线模组驱动样品进行微步距移动,探针仅做上下运动,实现了扫描探针法电阻测试,节约了硬件成本。选用Keithley 2450型数字源表,使得可在输出恒电流的同时进行电压测量,且其自带输出回读功能,简化了测试装置并提高了测量数据的准确性。通过对块体Cu-Bi2Te3金属-半导体焊接样品进行界面电阻测量,验证了测试装置的稳定性和可重复性。Interface resistance is an important parameter in the fabrication and performance characterization of semiconductor devices.Aiming at the measurement of interface resistance for metalsemiconductor interconnected bulk samples,an automatic test apparatus based on scanning probe method was built by using Keithley 2450 digital source meter,self-made clamping force visualization fixture,motion control card and linear modules,etc.The test software was developed based on LabVIEW.The driving mode of the conventional scanning probe method was changed,that was,the linear module was used to drive the sample to displace in a micro step and the probe only moved up and down,so that the resistance was tested by the scanning probe method and the hardware cost was saved.The Keithley 2450 digital source meter was selected,which can output constant current and measure voltage at the same time.It had its own output readback function,which can simplify the test apparatus and improve the accuracy of measured data.The stability and repeatability of the test apparatus were verified by measuring the interface resistance of a bulk Cu-Bi2Te3 metal-semiconductor soldering sample.

关 键 词：扫描探针法 界面电阻 测试装置 LABVIEW 数字源表 

分 类 号：TM934.14[电气工程—电力电子与电力传动]