Ce_(2)(SO_(4))_(3)对铜电沉积层晶粒细化的作用研究  

Effect of Ce_(2)(SO_(4))_(3) on Grain Refinement of Copper Electrodeposited Layers

作　　者：徐仰涛[1,2] 裴亮 杨斌 代靖民[1,2] 王超 Xu Yangtao;Pei Liang;Yang Bin;Dai Jingmin;Wang Chao(State Key Laboratory of Advanced Processing and Reuse of Non-Ferrous Metals,Lanzhou University of Technology,Lanzhou 730050,China;Baiyin Advanced Materials Research Institute,Lanzhou University of Technology,Baiyin 730900,China;Bai Yin Nonferrous Group Co,LTD,Baiyin 730900,China)

机构地区：[1]兰州理工大学省部共建有色金属先进加工与再利用国家重点实验室,甘肃兰州730050 [2]兰州理工大学白银新材料研究院,甘肃白银730900 [3]白银有色集团股份有限公司,甘肃白银730900

出　　处：《中国稀土学报》2023年第5期956-965,I0004,共11页Journal of the Chinese Society of Rare Earths

基　　金：甘肃省重点研发计划项目(21YF5GD186);2020年白银市科技计划项目(2020-1-3G);支持打造特色载体推动中小企业创新创业(实施双创载体升级工程-3)。

摘　　要：采用添加不同浓度Ce_(2)(SO_(4))_(3)的工业电解液在哈林槽中进行电沉积获得阴极铜沉积层,通过扫描电子显微镜(SEM)、原子力显微镜(AFM)及X射线衍射仪(XRD)分析铜沉积层微观形貌、晶粒尺寸及晶面取向,通过阴极极化曲线(LSV)、循环伏安曲线(CV)及计时电流曲线(CA)研究不同浓度Ce_(2)(SO_(4))_(3)对铜沉积层电化学行为的影响。结果表明,铜沉积层有一定的取向性,在(220)择优取向程度最大,Ce_(2)(SO_(4))_(3)浓度增加,(220)择优取向程度逐渐减小。同时,在工业电解液中加入Ce_(2)(SO_(4))_(3)并不改变铜的电结晶形核机制,仍为三维瞬时形核,成核数密度增大,过电位增大。当Ce_(2)(SO_(4))_(3)的添加量为0.8 g·L^(-1)时,阴极极化程度以及成核数密度最大,有利于晶核的形成,抑制了晶粒的长大,可以获得晶粒细小的铜沉积层。An industrial electrolyte with different concentrations of Ce_(2)(SO_(4))_(3) was used to obtain the cathodic copper deposition layer by electrodeposition in a Harlem bath.The microscopic morphology,grain size and grain orientation of the copper deposition layer were analyzed by scanning electron microscopy(SEM),atomic force microscopy(AFM)and X-ray diffraction(XRD),and the effects of different concentrations of Ce_(2)(SO_(4))_(3) on the electrochemical behavior of the copper deposition layer were investigated by cathodic polarization curves(LSV),cyclic voltammetry curves(CV)and chronocurrent curves(CA).The results show that the copper de⁃posited layer has certain orientation,and the degree of(220)selective orientation is the largest,and the degree of(220)selective orientation gradually decreases with the increase of Ce_(2)(SO_(4))_(3) concentration.Meanwhile,the addition of Ce_(2)(SO_(4))_(3) to the industrial electrolyte does not change the electrocrystallization nucleation mecha⁃nism of copper,which remains a three-dimensional transient nucleation with increased nucleation number densi⁃ty and increased overpotential.When the addition amount of Ce_(2)(SO_(4))_(3) is 0.8 g·L^(-1),the degree of cathodic po⁃larization as well as the nucleation number density is the largest,which is favorable to the formation of nuclei and inhibits the growth of grains,and the copper deposition layer with fine grains can be obtained.

关 键 词：稀土 Ce_(2)(SO_(4))_(3) 工业电解液 电沉积 晶粒细化 

分 类 号：TG146.1[一般工业技术—材料科学与工程]