X射线光电子能谱仪的规范化管理与维护  

Standardized management and maintenance of X-ray photoelectron spectrometer

作　　者：陈英军 吴昊宬 夏炎[1] CHEN Yingjun;WU Haocheng;XIA Yan(College of Chemistry、Central Laboratory,Nankai University,Tianjin 300071,China)

机构地区：[1]南开大学化学学院、中心实验室,天津300071

出　　处：《实验室科学》2023年第5期174-177,共4页Laboratory Science

摘　　要：X射线光电子能谱仪(XPS)是进行表面分析的大型精密仪器,可表征材料表面元素种类、化学态和相对含量。为了保障仪器的良好运行,提高开放共享,以及保证所测试数据的可靠性,XPS日常应该科学规范化管理。资质认定管理体系中对设备管理的要求,使得XPS的管理有章可循。此外,XPS结构复杂,又是超高真空仪器,要正常运转,需要精心维护其真空系统、冷却系统和气路系统等。X-ray photoelectron spectrometer(XPS)is a large-scale precision instrument for surface analysis,which can characterize the types,chemical states and relative contents of elements on the surface of materials.In order to ensure the good operation of the instrument and the reliability of the tested data,XPS daily management should be scientific and standardized.The requirements for equipment management in the qualification accreditation quality system make the management of XPS have rules to follow.In addition,XPS has a complex structure and is an ultra-high vacuum instrument.In order to operate normally,its vacuum system,cooling system and gas path system need to be carefully maintained.

关 键 词：X射线光电子能谱仪(XPS) 规范化管理 资质认定 维护 

分 类 号：O657[理学—分析化学]