基于多孔阳极氧化铝的大气压毛细管等离子体电极放电研究  

Atmospheric Capillary Plasma Electrode Discharge Based on Porous Anodic Alumina

作　　者：王坤 李建[1] 王世庆[2] 金凡亚[2] 但敏[2] 张双[1] WANG Kun;LI Jian;WANG Shiqing;JIN Fanya;DAN Min;ZHANG Shuang(Neijiang Normal University,Neijiang 641100,China;Southwestern Institute of Physics,Chengdu 610041,China)

机构地区：[1]内江师范学院,内江641100 [2]核工业西南物理研究院,成都610041

出　　处：《真空科学与技术学报》2023年第10期863-869,共7页Chinese Journal of Vacuum Science and Technology

基　　金：内江师范学院校级重点项目(2022ZD011,2020ZD010)。

摘　　要：通过实验和模拟方式,对比分析了介质阻挡放电和基于多孔阳极氧化铝的毛细管等离子体电极放电。应用阳极氧化法制备的多孔阳极氧化铝(Porous anodic alumina,PAA)作为介质层进行了毛细管等离子体电极放电。研究了多孔阳极氧化铝介质层对毛细管等离子体电极放电的影响,对比分析了相同几何参量的介质阻挡放电和毛细管等离子体电极放电的放电过程。结果表明:应用多孔阳极氧化铝介质的毛细管等离子体电极放电更稳定,放电中产生的更密的微放电有助于提高放电的稳定性;多孔阳极氧化铝介质层的毛细管等离子体电极放电具有相对于介质阻挡放电高出两个数量级的电子密度和更高的电子温度。等离子体参数具有与多孔阳极氧化铝的孔分布同步的周期性,产生了等离子体射流模式,提高了放电稳定性。Dielectric barrier discharge and capillary plasma electrode discharge based on porous anodic alumina were compared and analyzed through experiments and simulations.A layer of porous anodic alumina(PAA)was prepared on the surface of aluminum plates using the anodizing method.The effect of the porous anodic alumina dielectric layer on capillary plasma electrode discharge was studied.The processes of dielectric barrier discharge and capillary plasma electrode discharge with the same geometric parameters were compared and analyzed.It is shown that the capillary plasma electrode discharge with porous anodic alumina is more stable.Dense micro discharge paths generated in the discharge are helpful to improve the stability.The capillary plasma electrode discharge of porous anodic alumina has two orders of magnitude higher electron density and higher electron temperature than the dielectric barrier discharge.Plasma parameters have a periodicity with the distribution of pores on the porous anodic alumina,which results in the plasma jet mode and improves the discharge stability.

关 键 词：多孔阳极氧化铝 毛细管等离子体电极放电 介质阻挡放电 放电稳定性 

分 类 号：O539[理学—等离子体物理]