Research on conductive-material-filled electrodes for sidewall insulation performance in micro electrochemical machining  

作　　者：Guo-Dong Liu Yu-Lan Zhu Sheng-Gui Liu Chao-Jiang Li 

机构地区：[1]School of Mechanical Engineering,Beijing Institute of Technology,Beijing 100081,People's Republic of China [2]Beijing Key Lab of Precision/Ultra-precision Manufacturing Equipments and Control,Department of Mechanical Engineering,Tsinghua University,Beijing 100084,People's Republicof China

出　　处：《Advances in Manufacturing》2023年第3期509-522,共14页先进制造进展（英文版）

基　　金：supported by the National Natural Science Foundation of China(Grant Nos.52205439,51775302);Beijing Institute of Technology Research Fund Program for Young Scholars(Grant Nos.2020CX04060,3030011182213).

摘　　要：In micro electrochemical machining(ECM)processes,stray corrosion causes undesired metal dissolution and the deterioration of shape accuracy.Adopting a sidewall-insulated electrode is an effective approach to suppressing stray corrosion.Most sidewall-insulated electrodes are made of metal substrate and non-metallic thin films.Nevertheless,the thin-film insulating materials attached to a metal substrate are susceptible to damage in an electrolytic environment.This study presents a novel concept of the conductive-material-filled electrode for better sidewallinsulation performance.The micro-scale quartz tube serves as the insulating substrate.Commercially available conductive fillers including metal wire,molten metals,and silver powder are filled inside the working cathode of the quartz tube.Consequently,the metal-wire-filled electrode,moltenmetal-filled electrode,and nano-powder-filled electrode are designed and fabricated.From the verification results of electrode toughness,material removal rate,and surface topography,the metal-wire-filled electrode and moltenmetal-filled electrode exhibit the same performance as a traditional metal-based electrode and much better durability.By contrast,the nano-powder-filled electrode is unable to withstand long-term ECM processes because of the loss of cured powder particles.In ECM experiments,microstructures with steep sidewalls(taper angle<9.7°)were machined using the metal-wire-filled electrode and molten-metal-filled electrode,which could replace the traditional electrode,achieving a longer service life and superior sidewall-insulation performance.

关 键 词：Electrochemical machining(ECM) Conductive-material-flled electrode Stray corrosion Sidewall insulation Quartz substrate 

分 类 号：TG1[金属学及工艺—金属学]