混合扫描式旋转靶离子注入机剂量控制系统  

Design of Dose Control System for Spinning Disks Implanter Based on Hybrid-Scanning

作　　者：曹华翔 彭立波 王迪平 罗南安 徐松 罗才旺 CAO Huaxiang;PENG Libo;WANG Diping;LUO Nanan;XU Song;LUO Caiwang(Changsha Branch of Beijing Semincore ZKX Electronic Equipment Co.,Ltd.,Changsha 410014,China)

机构地区：[1]北京烁科中科信电子装备有限公司长沙分公司,湖南长沙410014

出　　处：《电子工业专用设备》2023年第5期22-25,45,共5页Equipment for Electronic Products Manufacturing

摘　　要：为了进一步提升旋转靶离子注入机的设备产能,提出了一种基于混合扫描式旋转靶离子注入机剂量控制系统;论述了该旋转靶离子注入机剂量控制系统设计思路、工作原理及控制离子束按设定的剂量精确均匀地注入到晶片表面的实现方法。介绍了该剂量控制系统硬件组成,并描述了剂量控制系统的核心部件剂量积分仪的详细硬件设计方案。基于该剂量控制系统的旋转靶离子注入机已批量交付客户使用,注入均匀性和重复性均达到1%以内。In order to further enhance production capacity of the spinning disks implanter,a dose control system for spinning disks implanter based on hybrid-scanning is proposed.Firstly,the design concept and working principle of the dose control system for the spinning disks implanter are introduced,and the control method of dose and uniform distribution of implanted ions is described.Secondly,the hardware composition of the dose control system for the spinning disks implanter was proposed.Finally,a detailed introduction is given to the hardware design of the dose integrator,which is the core component of the dose control system.The spinning disks implanters based on the hybrid-scanning dose control system have been delivered to customers in batches,the implant uniformity and repeatability better than 1%have been obtained for all of them.

关 键 词：旋转靶 剂量控制 离子注入机 静电扫描 均匀性控制 剂量积分仪 

分 类 号：TN305.3[电子电信—物理电子学]