机器视觉检测系统对准误差分析研究  

Research on Alignment Error of Machine Vision Inspection System

作　　者：王婷婷 张盼君 谭胜旺 蒋成刚 田嘉华 WANG Tingting;ZHANG Panjun;TAN Shengwang;JIANG Chenggang;TIAN Jiahua(The 45th Research Institute of CETC,Beijing 100176,China)

机构地区：[1]中国电子科技集团公司第四十五研究所,北京100176

出　　处：《电子工业专用设备》2023年第5期61-66,共6页Equipment for Electronic Products Manufacturing

摘　　要：针对视觉检测系统大视场、高分辨率、高对准精度等指标需求,建立了一套普遍适用的精度分析模型,识别检测系统误差来源,获取关键部件性能参数,作为光学设计、机械设计、算法设计、光机集成的重要依据。经测试,系统实际定位精度、重复精度均处于精度预算以内,方便分析并解决生产中出现的问题,证实了精度分析模型的可行性,也为更高精度的视觉检测系统提供了有效的研究方法。For the purpose of large field of view,high resolution,and high alignment accuracy of machine vision inspection system,a set of generally applicable precision analysis model is established,which identify the error of the detection system.Also,the model is the important basis for the optical design,mechanical design,algorithm design,integration.After testing,system accuracy is higher than budget,which is beneficial for analyzing and solving production problems.This confirms feasibility of the model and provides an effective research method for higher precision visual detection systems.

关 键 词：机器视觉检测系统 科勒照明 无限共轭显微系统 精度预算 

分 类 号：TN307[电子电信—物理电子学]