晶圆减薄设备空气静压径向轴承静态性能研究  

Research on Static Performance of Aerostatic Radial Bearing for Wafer Grinding Equipment

作　　者：赵玉民 赵祥 陈钊 朱林 ZHAO Yumin;ZHAO Xiang;CHEN Zhao;ZHU Lin(The 45th Research Institute of CETC,Beijing 100176,China;Faculty of Material and Manufacture,Beijing University of Technology,Beijing 100124,China)

机构地区：[1]中国电子科技集团公司第四十五研究所,北京100176 [2]北京工业大学材料与制造学部,北京100124

出　　处：《电子工业专用设备》2023年第5期86-95,共10页Equipment for Electronic Products Manufacturing

摘　　要：空气静压主轴是晶圆减薄设备的关键部件,其磨削晶圆的精度取决于空气静压止推轴承和径向轴承的静态性能。针对空气静压径向轴承在静态性能方面存在承载力小和刚度低等问题,研究了空气静压径向轴承结构参数对静态性能的影响。通过建立流体场数学模型和数值模型,对供气压力、平均气膜厚度、节流孔直径、节流孔个数以及节流孔轴向位置这几种因素对空气静压径向轴承静态性能的影响进行了研究,得出了相关因素与轴承承载力、刚度和耗气量的变化规律曲线,据此优选出空气静压径向轴承的最佳参数。通过对比,流体场数学模型计算结果与数值模型有限元分析结果误差为3%,验证了有限元仿真方法的准确性,为晶圆减薄设备空气静压径向轴承设计提供了理论依据。Aerostatic spindle is the key component of wafer grinding equipment,and the grinding precision of aerostatic spindle depends on the static performance of aerostatic thrust bearing and radial bearing.Aiming at the problems of small bearing capacity and low stiffness of aerostatic radial bearing in static performance,the influence of structural parameters of aerostatic radial bearing on static performance is studied.By establishing the mathematical model and numerical model of fluid field,the effects of air supply pressure,average gas film thickness,orifice diameter,number of orifices and axial position of orifices on the static performance of aerostatic radial bearings are studied,and the variation curves of relevant factors of bearing capacity,stiffness and air consumption are obtained,based on which the optimal parameters of aerostatic radial bearings are selected.Through comparison,the error between the results of the fluid field mathematical model and the results of the numerical model finite element analysis is 3%,which verifies the accuracy of the finite element simulation method.A theoretical basis is provided for designing aerostatic radial bearings of wafer grinding equipment.

关 键 词：晶圆减薄 空气静压主轴 径向轴承 静态性能 

分 类 号：TN305[电子电信—物理电子学]