基于PI的3D叉指电极对称微型电容器的制备及性能  

Preparation and properties of 3D cross-finger electrode symmetrical micro capacitor based on PI

作　　者：纪伟伟[1] 高鹏[1] 刘宝成 孟占昆 王赫[1] 刘兴江[1] JI Weiwei;GAO Peng;LIU Baocheng;MENG Zhankun;WANG He;LIU Xingjiang(Science and Technology on Power Sources Laboratory,Tianjin Institute of Power Sources,Tianjin 300384,China;School of Electrical and Information Engineering,Tianjin University,Tianjin 300072,China)

机构地区：[1]中国电子科技集团公司第十八研究所化学与物理电源重点实验室,天津300384 [2]天津大学电气自动化与信息工程学院,天津300072

出　　处：《材料工程》2023年第11期205-213,共9页Journal of Materials Engineering

摘　　要：随着物联网的发展,微型化自供电电子产品的快速发展和进一步微型模块化大大刺激了对微尺度的电化学储能装置的迫切需求。在各电化学储能装置中,基于平面图案形状的超级电容器在小型化和集成化等功能性特征上与现代电子产品高度兼容。本工作采用半导体制备技术与电流体喷印技术相结合的方法制备柔性3D叉指电极对称微型电容器,并采用富氧活性炭油墨进行3D喷印,通过调控优化电场强度、线宽、喷印层数等参数,制备3D叉指对称电极,采用电子散射能谱(EDS)、扫描电子显微镜(SEM)、流变仪、电化学工作站以及器件测试系统对材料、浆料以及微型电容器器件进行表征,探究材料以及浆料对3D叉指电容器性能的影响,结果表明:利用半导体和电流体喷印相结合工艺制备的3D叉指微型电容器具有优异的性能,其面积电容可以达到22.3 mF·cm^(-2),此外,通过封装优化,此器件在循环2000周次后可以实现96%的容量保持率。这种简易可控制的3D喷印技术为先进的微型化电化学储能器件提供了一种有效的制备途径。With the development of the Internet of Things,the rapid development of miniaturized selfpowered electronic products and further micro-modulation greatly stimulate the urgent demand for microscale electrochemical energy storage devices.In each electrochemical energy storage device,the supercapacitor based on the plane pattern shape is highly compatible with modern electronic products in terms of functional features such as miniaturization and integration.In this work,the flexible 3D interdigital electrode symmetric micro capacitor was prepared by the combination of semiconductor preparation technology and electrophoresis printing technology,and the 3D printing was carried out by using oxygen enriched activated carbon ink.The 3D interdigital symmetric electrode was prepared by adjusting and optimizing the electric field strength,line width,number of printing layers and other parameters.The energy dispersive spectrometer(EDS),scanning electron microscopy(SEM),rheometer,electrochemical workstation and test system were used to characterize materials,pastes and microcapacitor devices,and to explore the influence of materials and pastes on the performance of 3D interdigital microcapacitor.The results that the 3D interdigital supercapacitor prepared by the combination of semiconductor and electrophoresis printing process has good performances,and its area capacitance can reach 22.3 mF·cm^(-2).In addition,the device can achieve 96% capacity retention after 2000 cycles through packaging optimization.This simple and controllable 3D jet printing technology provides an effective way to prepare advanced miniaturized electrochemical energy storage devices.

关 键 词：柔性 叉指电极 3D 微型电容器 

分 类 号：TK02[动力工程及工程热物理]