两面共体非球面反射镜光轴一致性高精度测量方法研究(特邀)  

Research on high precision testing method for mirror optical axis of two-sided community aspheric mirror(invited)

作　　者：王兆明[1] 栗孟娟[1] 于秋跃 李春林[1] 赵子跃 王经华 吕天斌 张兆健 于长锁 Wang Zhaoming;Li Mengjuan;Yu Qiuyue;Li Chunlin;Zhao Ziyue;Wang Jinghua;Lv Tianbin;Zhang Zhaojian;Yu Changsuo(Beijing Institute of Space Mechanics&Electricity,Beijing 100094,China)

机构地区：[1]北京空间机电研究所,北京100094

出　　处：《红外与激光工程》2023年第9期31-38,共8页Infrared and Laser Engineering

摘　　要：同轴四反式光学系统的研制可采用非球面主镜和四镜一体化成型制造法,该方法极大地降低了系统零件复杂度,同时减轻了整机质量,提高了装机效率,但对后期光学系统装调的自由度产生了约束,因此,在镜面制造过程中,两者的光轴一致性需要精确测量及控制。在现有干涉测量法的基础上,提出了一种检测两面共体非球面镜光轴一致性的方法。在干涉检测光路中,两个非球面表面的光轴通过精密调整和严格标定后分别引出到两个计算全息片(CGH)补偿器上,CGH经过设计后,其特定区域可发出平行光,经另一片CGH反射后在干涉仪中形成表征两片CGH夹角的干涉条纹,解算干涉条纹的波前倾斜可得出两非球面的光轴偏差,对一两面共体待测非球面光学零件进行了CGH设计和检测光路的误差分析,显示测试精度可以达到1″。设计投产了CGH补偿器,搭建干涉检测光路,完成了光轴一致性的测量,数据处理解析出的波前倾斜为(1.544λ,0.441λ),计算出光轴夹角为(0.0070°,0.0020°),使用经纬仪复测的两片CGH的夹角为(0.0071°,0.0019°)。使用轮廓仪法对干涉测量法结果进行了比对验证,分别扫描主镜和四镜的面形轮廓,统一坐标系后,主镜和四镜的光轴夹角为(0.0071°,0.0020°),三者显示出较高的一致性。该方法具有直观性强、检测精度高的优点。Objective When the aspheric primary mirror and fourth-mirror integrated molding manufacturing method is used in coaxial four-mirror optical system,the complexity of system parts and weight of the whole machine would be reduced,and the installation efficiency could be improved greatly.Besides,the degree of freedom is constrained in later optical system assembly,so the optical axis of the two aspheric mirror needs maintain a high degree of consistency in the mirror manufacturing process.On the basis of the existing interferometry method,a new method is proposed to measure the optical axis deviation of two-sided community aspheric mirror.Methods Based on the existing interferometric measurement method,a method of calculating the optical axis consistency of CGH interferometric wavefront tilt is proposed.The principle of the measurement method is introduced in detail(Fig.1).Figure 1(a)shows the CGH optical measurement system of the two-sided community aspheric mirror.The surface of the aspheric mirror to be measured is S1 and S2.Interferometer 1 and CGH1 are used to measure the surface shape of the aspheric surface S1.The optical axes of CGH1 and aspheric S1 will reach a high consistency after the primary aberration is controlled strictly in the interferometric measurement optical system.Similarly,the optical axes of CGH2 and aspheric S2 would also be consistent.The optical axes of CGH1 and CGH2 would respectively characterize the optical axes of S1 and S2.The optical axes of CGH1 and CGH2 are both perpendicular to their optical surfaces in the design model.Figure 1(b)shows the interferometric optical system for measuring the angle between two CGHs.CGH1 is designed to emit parallel laser in a specific area,and after reflection by CGH2,an interference fringe representing the angle between two CGH compensators is formed in the interferometer.The optical axis deviation of the two aspheric surfaces can be obtained by solving wavefront tilt of the interference fringe(Eq.1).Results and Discussions For a diameter Φ500 mm tw

关 键 词：光学检测 光轴一致性测量 计算全息 两面共体非球面 

分 类 号：TB96[机械工程—光学工程]