大于3 GHz超宽带FBAR滤波器结构设计与仿真  

Design and Simulation of Ultra-Wideband FBAR Acoustic Wave Filters with Bandwidth Exceeding 3 GHz

作　　者：陈功田 谢若渊 孙景 张伟 杨斌[1] CHEN Gongtian;XIE Ruoyuan;SUN Jing;ZHANG Wei;YANG Bin(College of Materials Science and Engineering,Hunan University,Changsha 410082,China;The 26th Institude of China Electronics Technology Group Corporation,Chongqing 400060,China)

机构地区：[1]湖南大学材料科学与工程学院,湖南长沙410082 [2]中国电子科技集团公司第二十六研究所,重庆400060

出　　处：《压电与声光》2023年第5期663-666,共4页Piezoelectrics & Acoustooptics

基　　金：湖南省重点研发计划资助项目(2022GK2038)。

摘　　要：该文提出了一种获得相对带宽约为70.61%的基于氮化铝薄膜的超宽带薄膜体声波谐振器(FBAR)滤波器的设计方法,即在中心频率为6.5 GHz下滤波器的带宽为4.835 GHz。仿真分析表明,通过串并联电感的方式,并在电感端串并联电容,可消除因增加电感而带来的谐波谐振点干扰对带通的影响,实现了FBAR滤波器的超宽带。该工作开辟了设计和制作带宽超过3 GHz的超宽带体声波滤波器的新途径。In this paper,a design method for obtaining an ultra-wideband thin film bulk acoustic resonator(FBAR) filters based on aluminum nitride thin film with a relative bandwidth of about 70.61% has been proposed,that is a bandwidth of 4.835 GHz at a center frequency of 6.5 GHz.The simulation result shows that by series-parallel inductance and series-parallel capacitance at the inductance end,the influence of harmonic resonance point interference caused by adding external inductance on the bandpass can be eliminated,realizing the ultra-wideband of FBAR filters.This work opens up a new way to design ultra-wideband bulk acoustic wave filters with bandwidths exceeding 3 GHz.

关 键 词：薄膜体声波谐振器 FBAR滤波器 超宽带体声波滤波器 氮化铝 

分 类 号：TN384[电子电信—物理电子学] TN713