基于光子晶体纳米梁腔的反射壁下载型电光调制器  

Download Type Electro⁃Optic Modulator with Reflective Wall Based on Photonic Crystal Nanowire Cavity

作　　者：朱文玲 陈鹤鸣 徐文凯 胡宇宸 Zhu Wenling;Chen Heming;Xu Wenkai;Hu Yuchen(College of Flexible Electronics(Future Technology)&College of Electronic and Optical Engineering,Nanjing University of Posts and Telecommunications,Nanjing 210023,Jiangsu,China;Bell Honors School,Nanjing University of Posts and Telecommunications,Nanjing 210023,Jiangsu,China)

机构地区：[1]南京邮电大学电子与光学工程学院、柔性电子(未来技术)学院,江苏南京210023 [2]南京邮电大学贝尔英才学院,江苏南京210023

出　　处：《中国激光》2023年第19期21-29,共9页Chinese Journal of Lasers

基　　金：国家自然科学基金(61571237);江苏省自然科学基金(BK20151509)。

摘　　要：随着光通信产业和光互联技术的高速发展,具有高调制速率且易集成的小尺寸电光调制器件研究越来越重要。提出了一种以硅绝缘体(SOI)材料为基底的光子晶体纳米梁腔(PCNC)反射壁下载型电光调制器。信号光经过主线波导后首先被锥形波导耦合进一维光子晶体纳米梁腔中,然后进入下载波导并输出。优化主线波导与下载波导中反射圆孔的位置与个数,可以提高器件的整体透射率。纳米梁腔采用圆孔形渐变孔径,使得光束更好地被束缚在腔内。同时,在纳米梁腔两侧引入掺杂以形成PN结,施加较低偏压以改变纳米梁腔的谐振波长,从而实现工作波长光信号的“通”“断”调制。运用三维时域有限差分(3D‐FDTD)法对调制器的光学特性和电学性能进行仿真分析。结果表明,该电光调制器可以实现波长为1550.01 nm的光信号调制,调制电压仅为1.2 V,插入损耗为0.2 dB,消光比为24 dB,面积仅为54μm2,调制速率为8.7 GHz,调制带宽为122 GHz,调制速率下的能耗仅为4.17 pJ/bit。所提出的电光调制器结构紧凑,性能优异,有望应用于高速大容量光通信系统和集成硅光子技术等领域。Objective With the development of optical interconnection and high-speed optical communication,electro-optic modulators have become a research hotspot.Silicon insulator materials have the advantages of compatibility with the complementary metal oxide semiconductor process,high integration,low power consumption,and high temperature resistance.There are several electro-optic modulators based on silicon materials.Electro-optic modulators with high modulation rate,compact size,and easy integration have been investigated previously,and the study on electro-optic modulators is crucial.Therefore,we design an electro-optic modulator with a reflective wall based on a one-dimensional photonic crystal nanowire cavity(PCNC).The modulator exhibits a high extinction ratio,large modulation bandwidth,and high modulation rate.Furthermore,it has a compact and simple structure and can easily to cascade other silicon photonic devices.With the development of integrated photonics in communication systems,the cascade of silicon photonic devices has a wider application prospect.Methods This study proposes a download-type electro-optic modulator with a reflective wall based on a silicon-on-insulator(SOI)one-dimensional PCNC.The main line waveguide,one-dimensional PCNC and download-type waveguide are used to form a download-type structure with a reflective wall.The duty cycle of the nanowire cavity decreases linearly from the center of the waveguide to the two ends,and doping is introduced at both sides of the modulator to form PN junctions.The finite difference time domain(FDTD)model in the optical simulation software Lumerical is used for simulation analysis.According to the free carrier dispersion effect in the silicon material,when the modulation voltage applied at both ends of the electro-optic modulator changes,the dielectric constant of the nanowire cavity material also changes.The refractive index change in the nanowire cavity produces a slight difference;hence,the resonant frequency of the cavity changes,i.e.,the central waveleng

关 键 词：光通信 载流子色散效应 时域有限差分法 光子晶体纳米梁腔 硅基波导 电光调制器 

分 类 号：TN761[电子电信—电路与系统]