Chip-integrated metasurface full-Stokes polarimetric imaging sensor  

作　　者：Jiawei Zuo Jing Bai Shinhyuk Choi Ali Basiri Xiahui Chen Chao Wang Yu Yao 

机构地区：[1]School of Electrical,Computer and Energy Engineering,Arizona State University,85281,Tempe,AZ,USA [2]Center for Photonic Innovation,Arizona State University,85281 Tempe,AZ,USA [3]Biodesign Center for Molecular Design and Biomimetics,Arizona State University,85281 Tempe,AZ,USA

出　　处：《Light(Science & Applications)》2023年第10期2131-2144,共14页光（科学与应用)（英文版）

基　　金：supported in part by NSF under Grant No.2048230 and 1809997;DOE under Grant No.DE-EE0008999;Device fabrication and characterization in the Center for Solid State Electronics Research(CSSER);LeRoy Eyring Center for Solid State Science(LE-CSSS)at Arizona State University was supported,in part,by NSF contract ECCS-1542160.

摘　　要：Polarimetric imaging has a wide range of applications for uncovering features invisible to human eyes and conventional imaging sensors.Chip-integrated,fast,cost-effective,and accurate full-Stokes polarimetric imaging sensors are highly desirable in many applications,which,however,remain elusive due to fundamental material limitations.Here we present a chip-integrated Metasurface-based Full-Stokes Polarimetric Imaging sensor(MetaPolarIm)realized by integrating an ultrathin(~600 nm)metasurface polarization filter array(MPFA)onto a visible imaging sensor with CMOS compatible fabrication processes.The MPFA is featured with broadband dielectric-metal hybrid chiral metasurfaces and double-layer nanograting polarizers.This chip-integrated polarimetric imaging sensor enables single-shot full-Stokes imaging(speed limited by the CMOS imager)with the most compact form factor,records high measurement accuracy,dual-color operation(green and red)and a field of view up to 40 degrees.MetaPolarIm holds great promise to enable transformative applications in autonomous vision,industry inspection,space exploration,medical imaging and diagnosis.

关 键 词：STOKES POLAR enable 

分 类 号：TP2[自动化与计算机技术—检测技术与自动化装置]